3D Two-Phase Microfluidic Cooling With Wicking Boiling Surfaces

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Solution Overview

Problem

Computing devices generate significant heat, which can damage components and requires effective cooling systems. Existing cooling systems face challenges in managing varying thermal demands across different computing applications.

Innovation Solution

A processor design incorporating a wicking heat spreader with a microfluidic volume between two dies, featuring through-silicon vias (TSVs) for electrical connection and boiling enhancement surface features to promote heat transfer and vapor bubble formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional cooling systems are used, then device simplicity is maintained, but heat transfer efficiency is insufficient

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidcooling system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent employs a wicking heat spreader with porous structure containing capillary channels. The porous material enables passive fluid transport through capillary action without pumps, while providing large surface area for heat transfer. The capillary channels draw cooling fluid upward against gravity, enabling efficient heat removal from the processor die.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The patent utilizes two-phase cooling where the cooling fluid undergoes phase transition from liquid to vapor at the heating surface. Vapor bubbles form at nucleation sites on the heated surface, absorbing latent heat of vaporization. The vapor rises and condenses elsewhere, releasing heat, completing the thermodynamic cycle and providing high heat transfer efficiency.

Inventive Principle:
Principle #36Phase transitions

2Temperature

If standard heat spreader surfaces are used, then manufacturing simplicity is maintained, but heat transfer and vapor bubble formation are insufficient

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidsurface feature manufacturing
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent introduces localized surface features called nucleation sites on the heat spreader surface. These are not uniform across the entire surface but are strategically positioned areas with specific micro-structures (such as pits, protrusions, or controlled roughness) that promote vapor bubble formation. This local modification enhances heat transfer at critical locations without requiring complete surface restructuring.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The nucleation sites are pre-formed on the heat spreader surface during manufacturing, preparing the surface in advance to facilitate vapor bubble formation. This preliminary structuring ensures that when the two-phase cooling system operates, vapor bubbles can immediately form at these predetermined locations, enhancing heat transfer efficiency from the start of operation.

Inventive Principle:
Principle #10Preliminary action

3Temperature

If single-phase cooling is used, then system simplicity is maintained, but thermal management capacity is insufficient for high heat loads

Engineering Contradiction:
Improvethermal management capacityVSAvoidcooling system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent implements two-phase cooling where the working fluid alternates between liquid and vapor phases. Liquid coolant absorbs heat from the processor die, undergoes phase change to vapor at the heating surface (absorbing latent heat), vapor rises and condenses in a heat exchanger (releasing latent heat), and returns as liquid to repeat the cycle. This phase transition mechanism provides superior heat transfer capacity compared to single-phase cooling.

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The two-phase cooling system is designed to be self-regulating. The phase change process automatically adjusts to heat load variations - higher heat loads produce more vapor, which increases the cooling effect. The capillary wicking structure self-adjusts fluid flow based on heat demand without external control, providing adaptive thermal management.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances heat transfer efficiency by utilizing a wicking heat spreader and boiling enhancement surface features, effectively managing thermal energy and preventing component damage.

Implementation Method 1

a wicking heat spreader positioned in the microfluidic volume

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

a boiling enhancement surface feature positioned on at least one surface of the wicking heat spreader

Methodology Applied
Scientific EffectBoiling: Boiling

Implementation Method 3

utilizing a wicking heat spreader and boiling enhancement surface features, effectively managing thermal energy

Methodology Applied
Scientific EffectPhase change: Phase Change

Data Source

PatentUS20250123661A13-d structured two-phase microfluidic cooling with NANO structured boiling enhancement coating
Publication Date: 2025.04.17 MICROSOFT TECHNOLOGY LICENSING LLC
  • US20250123661A1 patent drawing
  • US20250123661A1 patent drawing
  • US20250123661A1 patent drawing

AI summary

A processor includes a first die, a second die connected to the first die with a microfluidic volume positioned between the first die and the second die, a wicking heat spreader positioned in the microfluidic volume; and a boiling enhancement surface feature positioned on at least one surface of the wicking heat spreader.