Micro-fluidic Variable Optical Device Array with Conductive Barrier Walls

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Solution Overview

Problem

The existing methods for manufacturing micro-fluidic variable optical device arrays face challenges in precise patterning due to light diffraction and non-uniform exposure when using photolithography to form electrodes in minute spaces, which affects the uniformity and accuracy of electrode formation.

Innovation Solution

A micro-fluidic variable optical device array is designed with a transparent substrate, an addressing layer with electrode wires, conductive barrier walls forming double walls to define cell regions, insulation material filling between the barriers, and a transparent electrode layer, allowing for independent control of fluid interfaces without the need for precise photolithography on the wall surfaces, and a voltage applying unit to adjust the fluid interface shapes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photolithography is used to form electrodes on the wall surface of each minute space, then the electrode pattern can be formed, but light diffraction intensifies and exposure uniformity decreases, causing difficulties in precise patterning

Engineering Contradiction:
Improveelectrode patterning precisionVSAvoidlight diffraction
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the electrode formation function from the wall surface photolithography process. Instead of forming electrodes directly on the minute cell walls through photolithography, the invention uses a separate transparent electrode layer formed on the substrate, which is then connected to the cell regions through conductive barriers. This removes the problematic photolithography step from the critical minute space patterning process.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the electrode formation into two distinct parts: (1) a transparent electrode layer formed on the substrate using standard photolithography, and (2) conductive barrier structures formed separately to connect the transparent electrode to the fluid-filled cell regions. This segmentation allows each component to be optimized independently, avoiding the light diffraction problem in minute spaces.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If photolithography is used to form electrodes on the wall surface of each minute space, then the electrode pattern can be formed, but exposure uniformity decreases, causing difficulties in precise patterning

Engineering Contradiction:
Improveelectrode patterning precisionVSAvoidexposure uniformity
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent extracts the electrode formation function from the wall surface photolithography process. Instead of forming electrodes directly on the minute cell walls through photolithography, the invention uses a separate transparent electrode layer formed on the substrate, which is then connected to the cell regions through conductive barriers. This removes the problematic photolithography step from the critical minute space patterning process.

Inventive Principle:
Principle #2Taking out (Extraction)

3Adaptability or versatility

If minute spaces are formed to arrange variable fluid lenses in an array, then the device can be used for 3D graphics or optical analysis, but the complex structure requires precise electrode formation on each wall surface

Engineering Contradiction:
Improvedevice application versatilityVSAvoidelectrode formation complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the electrode function into a single transparent electrode layer that spans across multiple cell regions, rather than requiring separate electrodes on each cell wall. The conductive barriers serve dual purposes as both structural elements defining the cell regions and as electrical connection elements. This merging dramatically simplifies the electrode formation process while maintaining the versatility of the minute variable lens array for various applications.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables precise control over fluid interfaces and eliminates issues of light diffraction and non-uniform exposure, allowing for accurate and uniform patterning of the electrode arrays, enhancing the performance and precision of the variable optical device arrays.

Implementation Method 1

The electrowetting technologies change a contact angle of conductive liquid by applying a voltage between the conductive liquid and an electrode coated with an insulator to control surface tension of the conductive liquid

Methodology Applied
Scientific EffectElectrowetting: Electrowetting

Implementation Method 2

an interface location or shape of the conductive and nonconductive fluids may be changed via an electrowetting method

Methodology Applied
Scientific EffectElectrowetting: Electrowetting

Data Source

PatentUS8982445B2Micro-fluidic variable optical device array and method of manufacturing the same
Publication Date: 2015.03.17 SAMSUNG ELECTRONICS CO LTD
  • US8982445B2 patent drawing
  • US8982445B2 patent drawing
  • US8982445B2 patent drawing

AI summary

A variable optical device array includes: a transparent substrate; an addressing layer including an electrode wire arranged on the transparent substrate; a barrier wall portion disposed on the addressing layer to define cell regions and including conductive barrier walls that are electrically connected to the electrode wire, wherein pairs of the conductive barrier walls are arranged to form double walls; an insulation material filling a region between each pair of conductive barrier walls; a conductive first fluid and a nonconductive second fluid disposed in each of the cell regions, wherein the first and second fluids are not mixed; an insulation coating layer disposed on a top surface of each of the conductive barrier walls and on side surfaces of each of the cell regions; a transparent electrode layer covering the cell regions; and a voltage applying unit to apply a voltage between the transparent electrode layer and the addressing layer.