Microfluidic Thermal Management With Piezoelectric Valve Cooling
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Solution Overview
Problem
Conventional thermal management systems for heat-generating components, such as processors, require large volumes and masses to effectively spread and exhaust heat, and are limited by degrading thermal interfaces, making them inefficient for high compute density and smaller electronic devices.
Innovation Solution
A microfluidic thermal management system that uses a working fluid flowing through a microfluidic volume with selectively actuated valves and pumping membranes, allowing direct cooling by applying electric voltage to piezoelectric elements to control fluid flow and adapt to thermal management demands, thereby reducing the need for large thermal interfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional thermal management systems are used to spread and exhaust heat, then heat removal is achieved, but large volumes and masses are required
Solution Approach 1:
The thermal management system is segmented into multiple microfluidic channels that are integrated directly into the processor substrate, dividing the heat removal function into distributed localized pathways rather than requiring a single large thermal interface
Solution Approach 2:
The microfluidic channels are nested within or directly on the processor die, integrating the cooling function into the existing processor structure, thereby eliminating the need for separate large-volume thermal management components
2Temperature
If conventional thermal interfaces are used, then heat transfer is achieved, but thermal interfaces degrade over time
Solution Approach 1:
The thermal management system is merged with the processor substrate by integrating microfluidic channels directly into the die structure, eliminating separate thermal interfaces that would otherwise degrade over time
Solution Approach 2:
The problematic thermal interface layer is extracted and eliminated by creating direct fluid-to-die contact through microfluidic channels, removing the source of thermal degradation
3Temperature
If conventional thermal management systems are used, then heat exhaustion is achieved, but they are inefficient for high compute density
Solution Approach 1:
The thermal management capability is segmented into multiple micro-scale channels distributed across the processor surface, providing proportional cooling capacity that matches high compute density requirements
Solution Approach 2:
The system changes from conventional macro-scale thermal management parameters to micro-scale parameters, enabling more efficient heat removal per unit volume that matches the heat generation characteristics of high compute density processors
4Temperature
If conventional thermal management systems are used, then heat removal is achieved, but large thermal interfaces are required
Solution Approach 1:
The thermal interface function is segmented into multiple small microfluidic channels distributed across the processor surface, providing effective heat removal through distributed contact rather than requiring a single large thermal interface
Solution Approach 2:
The system transitions from two-dimensional thermal interface contact to three-dimensional microfluidic channel integration within the substrate, enabling efficient heat removal through volumetric cooling rather than surface-area-dependent interfaces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient heat management with smaller clearances, effectively cooling hot spots in high compute density devices and smaller electronic systems by directly applying cool fluid to the heat source, improving thermal conductivity and reducing temperature rises.
Implementation Method 1
a valve piezoelectric element in mechanical communication with a portion of at least one of the inlet valve and the outlet valve to move at least the portion of the at least one of the inlet valve and the outlet valve
Implementation Method 2
Flowing a working fluid through a microfluidic volume of a heat-generating component can provide direct cooling to a processor through on-die removal of heat
Data Source
AI summary
A thermal management device includes a microfluidic volume having a first peripheral side and a second peripheral side and including at least one thermal element, a first port to the microfluidic volume, a second port from the microfluidic volume, an inlet valve at the first port to the microfluidic volume, an outlet valve at the second port, and a valve piezoelectric element in mechanical communication with a portion of at least one of the inlet valve and the outlet valve to move at least the portion of the at least one of the inlet valve and the outlet valve and selectively allow fluid flow through the microfluidic volume.


