Integrated Microfluidic Valve Chip for Precise Flow Control

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Solution Overview

Problem

Existing fluid flow devices lack a compact and reliable design that integrates all components of a microfluidic system into a single chip, making them difficult to produce and maintain.

Innovation Solution

A fluid flow device with a system chip that integrates a valve unit, sensor unit, and flow channel on a substrate, featuring a valve chamber with inlet and outlet in the side wall, allowing for compact construction and precise control of fluid flow using a Piezo actuator and flexible flow tube elements, and utilizing silicon-on-insulator technology for manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a microvalve is integrated into a system chip with all microfluidic components, then compactness and reliability are improved, but manufacturing complexity increases

Engineering Contradiction:
Improvesystem reliabilityVSAvoidintegration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent integrates the valve unit, flow channel, and connection channel parts into a single system chip. The valve chamber is defined within the substrate, and the connection channel parts are formed by partially removing the substrate to create fluidic pathways that directly connect the valve inlet/outlet to the flow channel, eliminating the need for external connections and multiple bonding steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The connection channel parts extend mainly parallel to the plane defined by the substrate, utilizing the lateral dimension rather than vertical stacking. This approach reduces the height dimension of the device while maintaining all necessary fluidic connections within the substrate plane, achieving compactness without increasing overall device height.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If inlet and outlet of valve chamber are provided in the side wall, then compact construction is achieved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedevice volumeVSAvoidchannel alignment precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The valve chamber is segmented into distinct regions with the inlet and outlet both positioned in the side wall. The connection channel parts are separately formed by substrate removal to connect these openings to the flow channel, allowing independent optimization of each component's position and shape while maintaining overall compactness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mechanical connection between valve and flow channel is replaced by direct fluidic integration through substrate removal. The connection channel parts are formed by selectively removing substrate material to create continuous fluid pathways, eliminating the need for separate mechanical bonding and alignment procedures.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Length of stationary object

If connection channel part extends parallel to substrate plane, then device height is reduced, but flow channel routing complexity increases

Engineering Contradiction:
Improvedevice heightVSAvoidchannel routing complexity
Core Design Contradiction:
Length of stationary objectVSDevice complexity

Solution Approach 1:

The connection channel parts utilize the lateral plane of the substrate rather than extending vertically. By routing channels parallel to the substrate plane, the device height is minimized while the channel paths are optimized for the two-dimensional layout, reducing the need for complex three-dimensional routing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The substrate serves multiple functions: it provides the structural base for the system chip, defines the valve chamber volume, and forms the connection channel parts through selective removal. This multi-functionality simplifies the overall design by using a single component to achieve what would otherwise require multiple separate elements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables a compact, reliable, and easily producible fluid flow regulator device that can accurately control mass flow and flow velocity within a microfluidic system, eliminating the need for external connections and wafer bonding steps.

Implementation Method 1

A fluid flow device with a system chip that integrates a valve unit, sensor unit, and flow channel on a substrate, featuring a valve chamber with inlet and outlet in the side wall, allowing for compact construction and precise control of fluid flow using a Piezo actuator

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP3295068B1Fluid flow device, comprising a valve unit, as well as method of manufacturing the same
Publication Date: 2021.05.05 BERKIN
  • EP3295068B1 patent drawingFigure 1~2
  • EP3295068B1 patent drawingFigure 3~4
  • EP3295068B1 patent drawingFigure 5(a)~5(e)

AI summary

The invention relates to a fluid flow device (1), comprising a system chip (11) having a substrate (12), a flow channel (21) defined within said substrate, and a sensor unit (41) connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit (30) is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber (31) defined within said substrate, and a valve member (32) that is movably arranged within the valve chamber. The flow channel has a connection channel part (22) defined within said substrate (12), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.