Microfluidic Valve Gate Film Hydrophobic Parylene Layer

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Solution Overview

Problem

Microfluidic devices with pneumatic valve systems face issues with leakage and adhesion between the valve gate film and substrates, particularly due to hydrophilic surfaces, which can lead to non-reliable operation and fluid flow restrictions.

Innovation Solution

A microfluidic device design featuring a first substrate with a micro-flow path and valve seat, a second substrate with a cavity, and a hydrophilic valve gate film interposed between them, where the first parylene layer on the valve seat surface is processed to be hydrophobic, and the second parylene layer on the substrate surface is hydrophilic, allowing for effective air pressure control and reducing adhesion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the valve gate film and substrate surfaces are made hydrophilic to prevent fluid leakage, then sealing performance is improved, but adhesion between the valve gate film and substrate increases causing unreliable valve operation

Engineering Contradiction:
Improvesealing performanceVSAvoidvalve operation reliability
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The invention applies different surface properties to different regions of the valve system. The valve seat surface is treated to be hydrophobic to prevent adhesion and ensure easy opening, while the substrate and valve gate film maintain hydrophilic surfaces for proper sealing. This local differentiation resolves the contradiction between sealing performance and operational reliability.

Inventive Principle:
Principle #3Local quality

2Reliability

If the valve gate film adheres strongly to the substrate to prevent leakage, then sealing is improved, but fluid flow restriction occurs due to non-reliable operation

Engineering Contradiction:
ImprovesealingVSAvoidfluid flow
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

By making the valve seat surface hydrophobic while keeping other surfaces hydrophilic, the invention ensures that adhesion occurs only where needed for sealing, while the hydrophobic valve seat prevents unwanted adhesion that would restrict fluid flow. This allows full fluid flow when the valve is open.

Inventive Principle:
Principle #3Local quality

3Strength

If the parylene layer on the valve seat is hydrophilic to match the substrate surface, then bonding is improved, but the valve gate film cannot detach easily causing operation failure

Engineering Contradiction:
Improvebonding strengthVSAvoiddetachment ease
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

Instead of making the valve seat surface hydrophilic to match the substrate, the invention inverts the approach by making it hydrophobic. This creates a non-adhesive surface that allows the hydrophilic valve gate film to detach easily, while bonding strength is maintained through proper surface treatment of other components.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures smooth operation of the valve system, prevents leakage, and allows for accurate fluid transfer by maintaining the hydrophilic nature of the valve gate film and substrate surfaces, while the hydrophobic parylene layer on the valve seat surface facilitates easy detachment and operation.

Implementation Method 1

A portion of the first parylene layer, which is disposed on a lower surface of the valve seat and contacting the valve gate film, has a hydrophobic surface

Methodology Applied
Scientific EffectHydrophobic surface property: Hydrophobe

Implementation Method 2

a valve gate film having a hydrophilic surface and provided between the first substrate and the second substrate

Methodology Applied
Scientific EffectHydrophilic surface property: Hydrophile

Implementation Method 3

the valve gate film opens and closes the micro-flow path by air pressure applied between the valve seat and the cavity

Methodology Applied
Scientific EffectPneumatic actuation: Pressure Increase

Data Source

PatentUS8444933B2Microfluidic device and method of manufacturing the same
Publication Date: 2013.05.21 SAMSUNG ELECTRONICS CO LTD
  • US8444933B2 patent drawing
  • US8444933B2 patent drawing
  • US8444933B2 patent drawing

AI summary

A microfluidic device includes a first substrate including a micro-flow path, and a valve seat protruding into the micro-flow path, a second substrate, coupled to the first substrate, and including a cavity corresponding to the valve seat, a first parylene layer disposed on an inner surface of the first substrate, and a valve gate film provided between the first substrate and the second substrate, such that the valve gate film opens and closes the micro-flow path with air pressure applied between the valve seat and the cavity, the valve gate film having a hydrophilic surface. A portion of the first parylene layer, which is disposed on a lower surface of the valve seat and contacting the valve gate film, has a hydrophobic surface.