Microfluidics Sensor Package Standoff Pattern for Cavity Gap Control

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Solution Overview

Problem

Microfluidics sensor chips, such as PCR chips, face challenges in precisely controlling fluid flow, which is crucial for accurate laboratory functions like DNA amplification, due to limitations in creating a controlled microfluidics cavity.

Innovation Solution

A microfluidics sensor package is designed with a standoff pattern on the sensor die that precisely spaces a lid above the active surface, creating a microfluidics cavity with a controlled gap height, allowing for precise fluid control through the use of a non-collapsible and inflexible material like copper, and a lid adhesive to secure the lid at a specific height.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a microfluidics cavity is created without precise spacing structure, then the device complexity is reduced, but the manufacturing precision of the cavity gap height deteriorates

Engineering Contradiction:
Improvecavity gap height precisionVSAvoidspacing structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The standoff pattern is formed on the sensor die before the lid is attached, establishing the precise cavity gap height in advance. This preliminary action ensures that when the lid is subsequently attached, the cavity is automatically formed with the correct dimensions without requiring additional precision machining steps.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The standoff pattern acts as an intermediary element between the sensor die and the lid. It mediates the spacing relationship, providing a mechanical reference that defines the cavity gap height. This intermediary structure transfers the precision requirement from the final assembly to a discrete component that can be manufactured and measured separately.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If bond pads and wires are exposed to fluid, then the ease of operation is improved, but the reliability of the sensor package deteriorates

Engineering Contradiction:
Improveelectrical connection accessibilityVSAvoidsensor package reliability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The sensor die is segmented into distinct functional regions: the active sensing area that interfaces with fluid, and the bond pad area that remains protected. The standoff pattern is positioned to define a cavity over the active area while leaving bond pads outside the fluid exposure zone, creating spatial separation between fluid interaction and electrical connection functions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the sensor die are assigned different properties: the region under the cavity is designed for fluid interaction, while the region with bond pads is designed for electrical connection and protection. The standoff pattern creates a local fluid containment zone that preserves the protective environment for bond pads while enabling fluid access to the sensing area.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS9670445B1Microfluidics sensor package fabrication method and structure
Publication Date: 2017.06.06 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US9670445B1 patent drawing
  • US9670445B1 patent drawing
  • US9670445B1 patent drawing

AI summary

A microfluidics sensor package includes a microfluidics sensor die having an active surface, bond pads on the active surface, and an active area on the active surface. A standoff pattern is formed on the active surface to extend to a precise height above the active surface. A lid is mounted to the standoff pattern by a lid adhesive. By using the standoff pattern to precisely space the lid above the active surface, a microfluidics cavity between the lid and the active surface is precisely created allowing for precise control of fluid flowing through the microfluidics cavity. By precisely controlling the flow of fluid through the microfluidics cavity, accurate results, e.g., of the laboratory functions performed on the fluid, are provided.