3D Microgyroscope with Oscillating Masses for Rotation Detection
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Solution Overview
Problem
Current microgyroscopes require multiple devices to detect rotations in three dimensions, making them costly and time-consuming to produce and evaluate, with previous designs facing challenges in manufacturing and accurately detecting movements due to complex structures.
Innovation Solution
A 3-D microgyroscope design featuring oscillating masses mounted on an anchor with additional masses for detecting Coriolis forces, using sensor elements and springs to allow radial and rotational movements, enabling detection of rotations around x, y, and z axes while maintaining stability and preventing erroneous measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If three separate microgyroscopes are used to detect rotations in three dimensions, then measurement precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines three separate microgyroscope functions into a single integrated device. One mass structure performs all three rotational measurements (around x, y, and z axes) simultaneously through coordinated oscillations in three directions, eliminating the need for three separate devices and their associated control and evaluation systems.
Solution Approach 2:
The single oscillating mass is designed to perform multiple functions: it oscillates in three orthogonal directions (x, y, z) to detect rotations around all three axes. This multi-functional design allows one structure to replace three separate sensors, reducing system complexity while maintaining measurement capabilities.
2Adaptability or versatility
If ring-shaped oscillating masses are arranged around a central anchor to enable three-axis sensing, then measurement capability is improved, but manufacturing difficulty increases
Solution Approach 1:
The oscillating mass is divided into three separate oscillation systems that can be independently controlled and manufactured. Each system oscillates in a specific direction (x, y, or z) and can be manufactured using standard MEMS techniques, avoiding the complexity of creating a single integrated ring-shaped mass.
Solution Approach 2:
Different portions of the oscillating mass are optimized for different functions: some regions are designed for oscillation in specific directions, with appropriate spring constants and geometric properties tailored to each oscillation mode. This allows each local region to be manufactured with standard processes while achieving complex overall behavior.
3Measurement precision
If multiple masses and components are used to achieve three-dimensional detection, then measurement precision is improved, but difficulty of detecting and measuring movements increases
Solution Approach 1:
The patent extracts the detection function from complex multi-mass structures and concentrates it in a single oscillating mass with three independent oscillation modes. This simplifies the measurement process by reducing the number of components that need to be tracked and correlated, while maintaining the capability to detect all three rotational axes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves high recording accuracy and cost-effectiveness by using sensor elements to detect deflections and rotations, allowing for uniform detection of all three axes with a stable system that can withstand external shocks and impacts.
Implementation Method 1
capable of sensing tilting and rotating movements owing to the Coriolis forces that would occur
Implementation Method 2
If made of several parts, every one of the oscillating masses can be arranged on one of these partial anchors. The important thing is, first of all, for the oscillating masses to allow radial movements away from and toward the anchor(s)
Data Source
AI summary
A microgryroscope for determining rotational movements about an x, y or z axis. At least one anchor is fastened to a substrate. A plurality of, in particular four, masses that oscillate radially with respect to the anchor are fastened to the anchor by springs. Drive elements are used to vibrate at least individual ones of the masses in an oscillatory manner in the x or y direction in order to produce Coriolis forces when the substrate is deflected. Sensor elements are used to detect deflections of the masses on account of the Coriolis forces produced. The oscillating masses are connected to at least one additional, non-oscillating mass which can, however, rotate together with the oscillating masses on the substrate about the at least one anchor. A further sensor element is associated with this additional mass.