Micro-LED Fabrication Chambers for In-Situ Color Conversion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The fabrication of micro-LED displays faces challenges such as the need for separate processes for different color micro-LEDs, stringent placement accuracy requirements, and inefficiencies in manufacturing throughput due to the lack of a seamless workflow for coating, curing, and rinsing processes.
Innovation Solution
A micro-LED display fabrication tool with multiple independently sealable chambers for dispensing, curing, and washing/drying, allowing for sequential processing without removing the workpiece from a controlled environment, enabling the formation of multiple color conversion layers with improved alignment accuracy and throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate processes are used for different color micro-LEDs, then color diversity is achieved, but manufacturing complexity increases
Solution Approach 1:
The patent combines multiple separate fabrication processes for different color micro-LEDs into a single integrated tool that can sequentially perform dispensing, curing, and washing operations for multiple color conversion layers (red, green, blue) on a single substrate without requiring separate processing equipment or pick-and-place steps.
Solution Approach 2:
The fabrication tool is designed with multi-functional chambers that can handle different color conversion materials and processing conditions within the same equipment, allowing a single tool to perform operations that would traditionally require multiple specialized processes for different LED colors.
2Adaptability or versatility
If pick-and-place step is used to transfer micro-LEDs, then integration of multiple colors is achieved, but placement accuracy requirements increase throughput limitations
Solution Approach 1:
The patent applies color conversion agents to a single substrate in advance, before final assembly, allowing all color conversions to be prepared simultaneously on one substrate rather than requiring sequential transfer and placement of separately fabricated micro-LEDs of different colors.
Solution Approach 2:
The invention extracts and eliminates the pick-and-place transfer step from the manufacturing process by performing all color conversion operations in-situ on a single substrate, removing the bottleneck that requires stringent placement accuracy and limits throughput.
3Adaptability or versatility
If workpiece is removed from controlled environment between processes, then process flexibility is improved, but contamination risks increase
Solution Approach 1:
The fabrication tool is divided into multiple independently sealable chambers (dispensing chamber, curing chamber, washing chamber) that can be sealed and pressurized independently, allowing each process step to occur in a controlled environment without requiring the workpiece to leave the controlled atmosphere between steps.
Solution Approach 2:
The patent uses transfer chambers as intermediary spaces that maintain controlled pressure and atmosphere conditions while allowing the workpiece to move between processing chambers, ensuring the workpiece never暴露 to uncontrolled environmental conditions during transitions.
4Ease of manufacture
If sequential processing is performed in separate tools, then process specialization is improved, but manufacturing efficiency decreases
Solution Approach 1:
The patent merges multiple specialized processing functions (dispensing of different color conversion materials, UV curing, washing, and drying) into a single integrated fabrication tool with multiple chambers, allowing sequential processing to occur without transferring the workpiece between separate specialized tools.
Solution Approach 2:
The fabrication tool enables continuous processing by maintaining the workpiece in a controlled environment throughout all processing steps, with each chamber sequentially performing its function without interruption or transfer to external tools, thereby eliminating idle time and提高效率.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances manufacturing efficiency, increases yield, and improves work product quality by allowing seamless processing of micro-LED displays, reducing contamination risks and defects, and enabling the production of multi-color micro-LED displays in a commercially viable manner.
Implementation Method 1
a first inkjet printer to deliver a first color conversion precursor onto the workpiece
Implementation Method 2
The first curing station cures the color conversion precursor materials on the workpiece to form a first color conversion layer
Implementation Method 3
a first washing assembly to remove uncured portions of the first color conversion precursor from the workpiece
Data Source
AI summary
An LED display fabrication tool includes a plurality of process chambers and a plurality of transfer chambers. The plurality of process chambers include first and second dispensing chambers to deliver first and second color conversion precursors onto a workpiece for fabrication of a light emitting diode (LED) displays, and first and second washing/drying chambers to remove uncured portions of the first and second color conversion precursors from the workpiece and then dries the workpiece. The plurality of transfer chambers are coupled to two process chambers by two respective sealable ports. First and second curing stations cure the precursors to form the first and second color conversion layers over a first set of LEDs on the workpiece.