Microstructured Micro-LED Laser Processing With Camera Position Feedback

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Solution Overview

Problem

The challenge in micro-LED display production is achieving high precision and economic fabrication of microstructured components with increasingly finer structures, as existing methods face limitations in positioning accuracy and cost-effectiveness, especially when dealing with large travel distances and high-resolution requirements.

Innovation Solution

A method and system utilizing camera-based position regulation and image processing to correct the positioning of micro-LEDs during laser processing, enabling precise alignment and processing even with high absolute position errors, combined with narrowband or ultraviolet light for enhanced resolution, and a beam deflection device for separate laser and observation paths, allowing for accurate and efficient micro-processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If camera-based position regulation with image processing is implemented, then positioning accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvepositioning accuracyVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements a feedback control system where a camera captures images of the workpiece, image processing algorithms analyze the captured images to determine actual positions of structures, and the control unit adjusts the workpiece position based on the deviation from target positions. This closed-loop feedback mechanism continuously monitors and corrects positioning errors, achieving high positioning accuracy despite the added system complexity.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces purely mechanical positioning systems with an optical-mechanical hybrid system. Instead of relying solely on mechanical precision, the system uses optical measurement (camera-based imaging) to detect position and electronic control to adjust positioning, substituting mechanical complexity with optical and computational approaches.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If laser processing is performed over large travel distances, then productivity is improved, but positioning accuracy deteriorates

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidpositioning accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The feedback control system continuously monitors the workpiece position during laser processing over large travel distances. The camera captures images at different positions, image processing determines actual coordinates, and the control unit calculates corrections to maintain accuracy throughout the entire processing area, enabling both large travel distances and high precision.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent introduces a measurement dimension (optical imaging) separate from the mechanical movement dimension. By capturing images and processing them to determine positions, the system creates an independent verification layer that compensates for accumulated mechanical positioning errors over large travel distances.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If micro-LED structures are miniaturized to increase resolution, then manufacturing precision is improved, but device complexity and cost increase exponentially

Engineering Contradiction:
Improvestructure resolutionVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent uses optical measurement systems (camera-based imaging with image processing) to achieve high positioning precision without requiring proportionally high mechanical precision. This substitution allows the system to handle miniaturized micro-LED structures by relying on optical detection and electronic control rather than purely mechanical precision, avoiding exponential complexity increases.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system creates optical copies (images) of the micro-LED structures to measure and control their positions. By working with optical representations rather than directly manipulating the physical structures, the system can achieve high precision for miniaturized components without the mechanical complexity that would otherwise be required.

Inventive Principle:
Principle #26Copying

4Measurement precision

If narrowband or ultraviolet light is used for observation, then measurement precision is improved, but use of energy increases

Engineering Contradiction:
Improveobservation resolutionVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The camera-based observation system operates periodically rather than continuously, capturing images at specific intervals or at key positions during the laser processing. This periodic operation reduces energy consumption while still providing sufficient measurement precision by obtaining critical position information at strategic moments rather than maintaining constant observation.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures extremely high positioning accuracy and economic representation in micro-LED display production, enabling precise laser processing over large travel distances and maintaining high resolution, thus overcoming the limitations of existing methods.

Implementation Method 1

capturing at least one portion of the workpiece lying in the object field of a camera and also generating an image representing the portion

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

capturing at least one portion of the workpiece lying in the object field of a camera and also generating an image representing the portion

Methodology Applied
Scientific EffectLight transmission: Refraction

Implementation Method 3

radiating in at least one laser beam directed at the workpiece to locally laser process the workpiece at at least one processing location of the workpiece

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 4

radiating in at least one laser beam directed at the workpiece to locally laser process the workpiece

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS20240367267A1Method and system of producing microstructured components
Publication Date: 2024.11.07 3D MICROMAC AG
  • US20240367267A1 patent drawing
  • US20240367267A1 patent drawing
  • US20240367267A1 patent drawing

AI summary

A method of producing a microstructured component includes a multiplicity of micro-functional elements on a substrate that carries an array of pixel-forming micro-light-emitting diodes on an electrical supply structure, including laser processing in at least one method stage in a laser processing station under control of a control unit, the method stage including positioning a workpiece to be processed in a processing position of the laser processing station by a workpiece movement system in reaction to movement signals of the control unit, the method including: observing the workpiece in a camera-based manner by a camera system, the observing including capturing at least one portion of the workpiece lying in the object field of a camera and also generating an image representing the portion; evaluating the image by image processing to ascertain position data representing an actual position of at least one structural element of the workpiece in the object field.