Microscope Spectral Inspection of Micro-LEDs With Noise Correction
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Solution Overview
Problem
Existing optical inspection technologies struggle to accurately measure the optical characteristics of micro or nano-sized light emitting elements, such as inorganic light emitting diodes, due to limitations in resolution and noise detection.
Innovation Solution
An optical inspection apparatus is developed with a microscope, camera, and optical measurement unit, including a two-dimensional spectroscope, to capture and analyze magnified image data of light emitting elements, enabling precise measurement of optical characteristics at the pixel level, and a correction unit to mitigate noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional optical inspection methods are used, then the inspection process is simple, but the measurement precision of optical characteristics for micro or nano-sized light emitting elements is insufficient
Solution Approach 1:
The optical inspection apparatus is divided into distinct functional modules: a microscope unit for magnification, a camera unit for image capture, and an optical measurement unit for spectral analysis. Each module performs a specific function, allowing the system to achieve high measurement precision for micro or nano-sized light emitting elements while maintaining manageable complexity through modular design
Solution Approach 2:
The apparatus transitions from conventional 2D optical imaging to 3D spectral-spatial analysis by incorporating an optical measurement unit that captures both spatial information (through the microscope and camera) and spectral information (through the spectrometer). This dimensional expansion enables precise measurement of optical characteristics at different wavelengths simultaneously across the light emitting element surface
2Measurement precision
If magnification is increased to resolve micro or nano-sized elements, then measurement precision improves, but noise detection becomes more significant
Solution Approach 1:
The regulation resistor serves as an electrical intermediary that stabilizes current distribution across the light emitting element array before optical measurement. By controlling the electrical input, the system reduces electrical noise and ensures uniform excitation, which prevents noise amplification during optical magnification and capture
Solution Approach 2:
The system creates multiple copies of the light emitting element image across different spectral bands captured by the optical measurement unit. By analyzing multiple spectral copies simultaneously, the apparatus can distinguish signal from noise through spectral differentiation, maintaining measurement precision while suppressing noise effects
3Reliability
If current is applied to light emitting elements for optical measurement, then optical characteristics can be measured, but current distribution uniformity is difficult to ensure
Solution Approach 1:
The jig is designed with individually adjustable contact points for each light emitting element, allowing local optimization of electrical contact and current distribution. Each contact point can be independently adjusted to ensure uniform current flow across all elements in the array, improving measurement reliability while maintaining current distribution stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus can measure per-location optical characteristics of individual light emitting elements with micro or nano sizes, providing accurate and reliable inspection results by ensuring uniform current distribution and noise correction.
Implementation Method 1
an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate
Data Source
AI summary
An optical inspection apparatus includes a stage that supports a target substrate, the target substrate including a plurality of light emitting elements, a jig that applies an electrical signal to the target substrate, the jig including a regulation resistor, a microscope that generates magnified image data of the target substrate, a camera that captures the magnified image data to generate a color image of the target substrate, and an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate.