Micro-LED Waveguide Trenches for Directional Light Extraction

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Solution Overview

Problem

Micro-LEDs with reduced physical dimensions face challenges in improving internal and external quantum efficiency due to high surface recombination rates, total internal reflection, and low light extraction efficiency, especially in III-phosphide-based LEDs with high refractive indices, which trap light and reduce the collection efficiency of near-eye display systems.

Innovation Solution

Incorporation of grating couplers and waveguides in semiconductor layers between micro-LED mesa structures to diffract light into desired directions, reducing total internal reflection and enhancing light extraction efficiency by guiding light out of the micro-LEDs and improving directivity for better collection by display optics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If micro-LEDs with reduced physical dimensions are used to achieve high packing density and resolution, then display resolution and packing density are improved, but light extraction efficiency deteriorates due to high surface recombination rates and total internal reflection

Engineering Contradiction:
Improvedisplay resolutionVSAvoidlight extraction efficiency
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The patent introduces waveguide structures and grating couplers that operate in the lateral dimension to extract light that would otherwise be trapped by total internal reflection at the vertical interfaces. The waveguides confine and guide light laterally to extraction regions, adding a dimensional pathway for light extraction that bypasses the limitations of vertical emission in miniaturized LEDs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent modifies the refractive index distribution by introducing dielectric waveguide layers with specific refractive indices between the semiconductor mesa structures. These waveguide layers create refractive index contrasts that enable total internal reflection for light confinement in the waveguide, followed by grating-induced diffraction for extraction, thereby changing the optical parameters to overcome size-related extraction limitations.

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If III-phosphide-based semiconductor materials with high refractive indices are used to achieve desired emission properties, then emission intensity is improved, but light extraction efficiency deteriorates due to increased total internal reflection

Engineering Contradiction:
Improveemission intensityVSAvoidlight extraction efficiency
Core Design Contradiction:
Illumination intensityVSLoss of energy

Solution Approach 1:

The patent introduces dielectric waveguide layers as intermediary structures between the high-refractive-index semiconductor materials and the external environment. These waveguide layers act as optical mediators that confine light through controlled total internal reflection and then enable extraction via grating couplers, thereby facilitating light extraction from materials that would otherwise trap light due to their high refractive indices.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the optical parameters by introducing intermediate dielectric layers with refractive indices between those of the semiconductor and air. This creates a stepped refractive index profile that reduces the abrupt index contrast at semiconductor-air interfaces, thereby reducing total internal reflection losses while maintaining the high emission intensity properties of the III-phosphide materials.

Inventive Principle:
Principle #35Parameter changes

3Volume of moving object

If conventional micro-LED structures are used to achieve compact size, then device size is reduced, but light collection efficiency by display optics deteriorates due to omnidirectional emission patterns

Engineering Contradiction:
Improvedevice sizeVSAvoidlight collection efficiency
Core Design Contradiction:
Volume of moving objectVSProductivity

Solution Approach 1:

The patent uses waveguide structures to redirect light emission from the vertical dimension to the lateral dimension. By confining light in the waveguide and extracting it through lateral grating couplers, the emission pattern is transformed from omnidirectional to a more directional lateral emission, improving coupling efficiency with display optics while maintaining compact device dimensions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces dynamic light management through the waveguide-grating system that actively directs light propagation. The waveguide dynamically confines and guides light based on incident angles, and the grating couplers dynamically extract light at specific angles, creating a dynamic emission pattern that can be optimized for display optics coupling rather than static omnidirectional emission.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly enhances light extraction efficiency and directivity of emitted light, improving the overall performance and efficiency of micro-LEDs in near-eye display systems by reducing trapped light and increasing the proportion of light collected by display optics.

Implementation Method 1

The grating couplers are configured to diffract the light guided by the regions of the first sublayer of the first semiconductor material towards the transparent dielectric material regions

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

Micro-LEDs with reduced physical dimensions face challenges in improving internal and external quantum efficiency due to high surface recombination rates, total internal reflection, and low light extraction efficiency

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentUS12148869B2Guided light extraction in trenches
Publication Date: 2024.11.19 META PLATFORMS TECHNOLOGIES LLC
  • US12148869B2 patent drawing
  • US12148869B2 patent drawing
  • US12148869B2 patent drawing

AI summary

A micro-light emitting diode (micro-LED) device includes semiconductor mesa structures, and waveguides and grating couplers in regions of a semiconductor layer between the semiconductor mesa structures. At least some light emitted in the active region of each semiconductor mesa structure can be coupled into and guided by a waveguide towards a grating coupler. The grating coupler is configured to diffract the guided light out of the micro-LED device, for example, in a direction substantially perpendicular to the light-emitting surface of the micro-LED device, through regions between the semiconductor mesa structures.