Wet Microchip Transfer Alignment With Chip Recovery for Micro-LEDs

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Solution Overview

Problem

The pick-and-place method for transferring micro-LEDs in display manufacturing is inefficient as the size of micro-LEDs decreases and display sizes increase, leading to decreased productivity.

Innovation Solution

A micro-semiconductor chip transfer apparatus that includes a wet alignment process using a chip supply module, alignment module, and extraction module, utilizing liquid spray, ultrasonic, and vibration cleaners to align and extract micro-semiconductor chips from a transfer substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the pick-and-place method is used for transferring micro-LEDs, then the transfer process can be performed with conventional equipment, but the productivity decreases as the size of micro-LEDs decreases and display size increases

Engineering Contradiction:
Improvetransfer speedVSAvoidalignment accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent uses a liquid carrier to transport micro-LEDs to the transfer substrate. The liquid flow enables simultaneous transfer of multiple micro-LEDs in parallel, dramatically increasing transfer speed compared to conventional pick-and-place methods while maintaining alignment accuracy through the fluidic guidance of the liquid carrier

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The patent transitions from mechanical pick-and-place operations in three-dimensional space to a two-dimensional liquid flow-based transfer method. The micro-LEDs are suspended and moved within the liquid plane, allowing parallel transfer across the entire substrate surface simultaneously rather than sequential transfer at discrete points

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If micro-LEDs are transferred to a substrate, then the display device can be manufactured, but the micro-LEDs cannot be reused leading to material waste

Engineering Contradiction:
Improvechip utilization rateVSAvoidchip waste
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The patent enables recovery and reuse of micro-LEDs through the liquid carrier system. Micro-LEDs that are misplaced or defective can be retrieved from the liquid carrier and reused in subsequent transfer cycles, significantly reducing material waste and improving chip utilization rate

Inventive Principle:
Principle #34Discarding and recovering

Solution Approach 2:

The liquid carrier automatically collects and returns micro-LEDs to the source substrate after transfer attempts. The system self-manages the retrieval and repositioning of micro-LEDs without requiring additional manual intervention, enabling continuous reuse cycles

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves the alignment accuracy and productivity of micro-semiconductor chip transfer by enabling efficient reuse of chips through a wet alignment process, enhancing the efficiency of the transfer process.

Implementation Method 1

a chip alignment module comprising an absorber configured to move along a surface of the transfer substrate to align first micro-semiconductor chips, among the plurality of micro-semiconductor chips, respectively in the plurality of grooves and to absorb the first liquid

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

a liquid spray cleaner configured to spray a second liquid to the absorber to extract the second micro-semiconductor chips from the absorber

Methodology Applied
Scientific EffectFluid spray: Fluid Spray

Implementation Method 3

an ultrasonic cleaner configured to emit ultrasonic waves towards the absorber to extract the second micro-semiconductor chips from the absorber

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Implementation Method 4

a vibration cleaner configured to vibrate the absorber to extract the second micro-semiconductor chips from the absorber

Methodology Applied
Scientific EffectMechanical vibration: Vibration

Data Source

PatentUS12532698B2Micro-semiconductor chip transfer apparatus and chip extraction apparatus
Publication Date: 2026.01.20 SAMSUNG ELECTRONICS CO LTD
  • US12532698B2 patent drawing
  • US12532698B2 patent drawing
  • US12532698B2 patent drawing

AI summary

A micro-semiconductor chip transfer apparatus includes: a wet chip supply module configured to supply a plurality of micro-semiconductor chips and liquid onto a transfer substrate; a chip alignment module including an absorber configured to move along a surface of the transfer substrate while absorbing the liquid; and a chip extraction module configured to extract, from the absorber, the micro-semiconductor chips remaining in the absorber.