Microlens Array Optical Waveguide for High-Speed Substrate Defect Inspection
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Solution Overview
Problem
Current substrate surface defect detection systems are inefficient, requiring millions of operations to detect defects across a typical exposure area, resulting in low detection speed and high operational time.
Innovation Solution
A substrate surface defect detection apparatus utilizing an optical waveguide with a microlens array and imaging component, which directs and converges light to enhance detection speed by allowing a single pass to image the entire substrate surface, and an image distortion correction method to improve image quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a conventional optical system is used to detect surface defects of substrate, then detection coverage can be achieved, but detection speed is extremely low requiring about 139 hours to scan entire exposure area
Solution Approach 1:
The patent divides the imaging function into multiple microlenses arranged in an array, where each microlens captures a portion of the substrate surface simultaneously. This segmentation allows parallel detection across the entire exposure area (26mm×33mm), reducing the detection time from 139 hours to a fraction of that time by capturing multiple fields of view in a single shot.
Solution Approach 2:
The patent transitions from sequential one-dimensional scanning to two-dimensional parallel imaging by arranging microlenses in an array configuration. Each microlens images a different region of the substrate surface, creating a multi-region simultaneous detection system that covers the entire exposure area in one operation rather than requiring sequential scanning.
2Reliability
If millions of operations are performed to detect defects across entire exposure area, then detection completeness is improved, but productivity decreases
Solution Approach 1:
The microlens array segments the detection task into multiple parallel operations, with each microlens responsible for imaging a specific region. This allows the system to maintain comprehensive defect detection across the entire substrate surface while performing all detections simultaneously, thus improving productivity without sacrificing detection completeness.
Solution Approach 2:
The patent merges multiple imaging functions into a single optical system by combining multiple microlenses in an array. This integration allows the system to perform what would traditionally require millions of sequential operations to be completed in a single shot, dramatically improving productivity while maintaining detection completeness through the combined coverage of all microlenses.
3Speed
If a single optical system is used for defect detection, then system simplicity is maintained, but detection speed is insufficient
Solution Approach 1:
The optical system is segmented into multiple microlenses arranged in an array, where each microlens acts as an independent imaging unit. This segmentation enables simultaneous multi-region detection, dramatically increasing detection speed. The segmented design is integrated into a single substrate holder, maintaining relative system simplicity while achieving high-speed detection.
Solution Approach 2:
The microlens array is nested within a single optical system architecture, with multiple microlenses integrated into one substrate holder or mounting structure. This nesting approach allows the complex multi-lens system to function as a unified device, improving detection speed without proportionally increasing operational complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly increases detection speed by reducing the number of operations needed to scan the substrate surface, improving efficiency and reducing costs, while correcting image distortion for accurate defect detection.
Implementation Method 1
at least one microlens array disposed on the second surface of the optical waveguide, the at least one microlens array comprising a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light
Data Source
AI summary
A substrate surface defect detection device includes an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate, a microlens array disposed on the second surface of the optical waveguide, the microlens array including a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, and an imaging component for receiving the converged light from the at least one microlens array for optical imaging. The substrate surface defect detection device requires significantly less time than conventional substrate surface defect detection devices.