Microlens Array Fabrication via Dynamic Laser Dragging
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Solution Overview
Problem
The laser dragging process for producing microlens arrays is limited by the inability to accurately determine the profile of the microlens, resulting in structures that do not meet desired specifications, which hampers their industrial applicability.
Innovation Solution
A manufacturing method that involves determining the motion of a substrate relative to a photomask, calculating the photomask features using numerical analysis, and producing the photomask to create microlens units with precise profiles, followed by a photolithography process to form microstructures with desired profiles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the laser dragging process uses photomask projection method with orthogonal two-dimensional dragging, then the manufacturing efficiency is improved, but the manufacturing precision of microlens profile deteriorates
Solution Approach 1:
The patent transforms the static photomask projection method into a dynamic laser dragging process where the substrate undergoes controlled three-dimensional motion (including rotation and translation along multiple axes) relative to the laser beam and photomask. This dynamic approach enables the laser to trace complex microlens profiles through coordinated motion, achieving both high manufacturing efficiency and precise profile control that static methods cannot provide
Solution Approach 2:
The patent extends the traditional two-dimensional orthogonal dragging to three-dimensional dragging by adding rotational motion and motion along additional spatial dimensions. The substrate can rotate around multiple axes and translate in three-dimensional space, allowing the laser beam to access and deposit material on complex curved surfaces, thereby achieving precise microlens profiles that require three-dimensional shaping capability
2Ease of manufacture
If the photomask pattern is defined by quadratic curves, then the ease of manufacture is improved, but the manufacturing precision of microlens profile deteriorates
Solution Approach 1:
The patent replaces the mechanical constraint of fixed photomask patterns with a programmable motion control system. Instead of relying on pre-defined quadratic curves in the photomask, the system uses computer-controlled motion to guide the laser beam along precise three-dimensional trajectories, allowing complex microlens profiles to be manufactured with high accuracy without complicating photomask fabrication
Solution Approach 2:
The patent changes the controlling parameters from static photomask pattern geometry to dynamic motion parameters (velocity, acceleration, position, orientation) of the substrate and laser beam. By controlling the temporal and spatial parameters of the dragging process, the system can generate complex microlens profiles that would be difficult to define with simple quadratic curves, thereby improving profile accuracy while maintaining photomask simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the accurate production of microlens units with complex profiles, such as ellipses and hexagonal close-packed arrays, enhancing the applicability and economic value of microstructures by ensuring precise alignment and superposition of laser light for optimal microstructure formation.
Implementation Method 1
making a laser light illuminate the substrate through the photomask to manufacture the microlens unit on the substrate by the superposition effect of the laser light
Implementation Method 2
performing a photolithography process by using the microlens unit to produce a microstructure on a photoresist substrate
Data Source
AI summary
A manufacturing method of microstructure comprises steps of: a motion determination step which determines the motion of a substrate relative to at least a photomask; a microlens determination step which determines the profile of a microlens unit on the substrate; an analysis step which calculates the feature of the photomask according to the motion of the substrate and the profile of the microlens unit by using a numerical analysis method; a production step which produces the photomask according to the feature of the photomask; driving the substrate to do the motion determined in the motion determination step, and meanwhile making a laser light illuminate the substrate through the photomask to manufacture the microlens unit on the substrate by the superposition effect of the laser light; and performing a photolithography process by using the microlens unit to produce a microstructure on a photoresist substrate.