Microlithographic Mirror With Piezoelectric Actuation and Compaction Control

The patent divides the smoothing layer into multiple sub-layers with different properties. The first sub-layer (closest to the reflective surface) has lower compaction sensitivity, while the second sub-layer has higher compaction sensitivity. This segmentation allows each layer to perform its specific function: the first layer provides a stable base that resists unwanted deformation, while the second layer can be selectively compacted to achieve desired surface profiles.

The patent applies different compaction sensitivities to different regions/layers of the smoothing layer. By making the first sub-layer less sensitive to compaction and the second sub-layer more sensitive, the patent creates local quality differences that enable controlled deformation in specific regions while maintaining stability in others. This allows precise control over which areas of the mirror surface deform and how.

The patent segments the smoothing layer into sub-layers with differentiated compaction sensitivities. When electron beam radiation is applied, the first sub-layer (with lower compaction sensitivity) remains relatively stable and maintains spatial homogeneity, while the second sub-layer (with higher compaction sensitivity) can be selectively compacted to achieve desired surface profiles. This segmentation prevents the spatial inhomogeneity that would occur if the entire layer had uniform high sensitivity.

The patent changes the compaction sensitivity parameter of the smoothing layer by creating sub-layers with different properties. The first sub-layer is designed with parameters that make it less sensitive to compaction (e.g., different material composition, density, or structure), while the second sub-layer has parameters that make it more sensitive. This parameter differentiation allows controlled response to electron beam radiation, achieving surface smoothing without the uncontrollable deformation that would occur in a uniformly sensitive layer.

Instead of using a single thin layer, the patent segments the smoothing function across multiple sub-layers. The first sub-layer can be relatively thin to provide deformation control, while the second sub-layer can be thicker to provide the smoothing capability. Together, they achieve both functions that would be difficult to achieve with a single thin layer.

The patent creates a composite smoothing layer structure where the first and second sub-layers have different material properties or structures. The first sub-layer is designed with properties that provide deformation control (lower compaction sensitivity), while the second sub-layer has properties that provide smoothing capability (higher compaction sensitivity). This composite structure combines the advantages of both thin and thick layers.