Microlithography Optical Housing with Integrated Support
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Solution Overview
Problem
Existing optical sub-systems in microlithography systems face challenges with complex designs that compromise thermal and dynamic properties, leading to inaccuracies and increased complexity in assembly and adjustment due to open support structures and asymmetric configurations.
Innovation Solution
A compact optical element module with a housing that supports multiple elongated optical sub-systems while maintaining external symmetry, integrating load-bearing and light-tight functions, allowing for simple and durable adjustments and reduced complexity in peripheral units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If open support structures are used to support lens barrels, then accurate positioning of lens barrels is achieved, but additional gas tight and light tight enclosures are required adding to system complexity
Solution Approach 1:
The patent merges the support structure with the enclosure by making the housing itself the support structure. The lens barrels are directly supported by the housing walls and surfaces, eliminating the need for separate open support frameworks and additional enclosures. This integration resolves the contradiction by achieving both accurate positioning and enclosed protection without adding system complexity.
2Measurement precision
If lens barrels are supported separately by support structures, then accurate positioning is achieved, but the design complexity and number of components increases
Solution Approach 1:
The patent combines multiple support functions into the housing structure itself. Different portions of the housing support different lens barrels directly, eliminating the need for separate support structures for each lens barrel. This reduces the number of components while maintaining accurate positioning through the integrated housing design.
3Adaptability or versatility
If asymmetric configurations are used to accommodate optical elements, then functional requirements are met, but thermal and dynamic properties are compromised
Solution Approach 1:
The patent employs asymmetric housing configurations where different portions of the housing have different shapes, thicknesses, and support characteristics tailored to the specific requirements of each optical element. This allows the housing to provide optimal thermal and dynamic properties for each lens barrel while accommodating asymmetric optical element arrangements, thus maintaining reliability despite functional adaptability requirements.
Data Source
AI summary
An optical projection system for a microlithography system includes a light path, a first lens unit receiving a first part of the light path, a second lens unit receiving a second part of the light path, and a support unit supporting the first and second lens units. The first and second lens units are elongated lens units including a plurality of lenses. The support unit includes a housing receiving a third part of the light path and enclosing a reflective element. The housing includes first and second interfaces. The first interface is a first support interface supporting the first lens unit. The second interface is a second support interface supporting the second lens unit at a location substantially opposite to the first interface.