Microlithography Polygon Triangulation Preserving Edge Data
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Solution Overview
Problem
In microlithography, existing fracturing algorithms lose critical information about the edges and vertices of original polygons during triangulation and subsequent fracturing, leading to grid snapping effects and image interference, which can result in defects and circuitry malfunctions.
Innovation Solution
The use of triangulation to partition polygons into triangles with arbitrary edge alignments, which preserves the original vertices and edge properties, allowing for accurate classification and encoding of true and false edges, thereby avoiding the introduction of new vertices and maintaining high precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional fracturing algorithms are used to divide polygons into rectangles and trapezoids, then the data can be processed by writing tools, but critical information about original edges and vertices is lost
Solution Approach 1:
The patent segments the polygon decomposition process into two distinct stages: triangulation (which preserves vertex information) followed by trapezoidalization (which provides tool compatibility). This segmentation allows each stage to optimize for its specific purpose without compromising the other.
Solution Approach 2:
The patent performs preliminary triangulation before final fracturing into rectangles and trapezoids. This preliminary action preserves the original vertex information in the triangular mesh, which can then be used to guide the subsequent fracturing process while maintaining awareness of which edges are original versus artificial.
2Ease of manufacture
If polygons are fractured into rectangles and trapezoids, then the data format matches writing tool requirements, but new vertices are introduced causing grid snapping effects
Solution Approach 1:
The patent applies different processing qualities to different parts of the geometry: original edges maintain high precision with preserved vertex information, while artificial fracturing edges can tolerate grid snapping. This local quality differentiation allows the system to prioritize precision where it matters most (original design intent) while accepting compromises where they don't affect functionality.
3Manufacturing precision
If all edges are treated as potentially vital for critical dimension, then precision is maintained, but processing time and computational resources increase
Solution Approach 1:
The patent extracts and separates the identification of original edges from the overall fracturing process. By using the triangular mesh as an intermediary, the system can easily identify which edges are original (from the polygon input) versus artificial (from fracturing), allowing selective processing where only original edges require high-precision treatment.
Data Source
Figure 1A~2D
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AI summary
The present disclosure relates to fracturing of polygon data, with one application being microlithography. In particular, it relates to preserving data regarding edges and/or vertices of the original polygons as the polygons are triangulated and even if the results of triangulation are further fractured.