Microlithography Shutter Geometry for Fast Multi-Beam Switching
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Solution Overview
Problem
Existing shutter mechanisms in microlithography devices suffer from increased moment of inertia and reduced rigidity due to long blade designs, leading to longer switching times, asymmetric switching times, heat dissipation, and mechanical vibrations, especially when handling multiple laser beams.
Innovation Solution
A shutter mechanism with a rotatable body and bi-stable solenoid actuator, featuring a low moment of inertia and a reflective surface geometry that allows for fast switching times and low mechanical impact, utilizing a bi-stable solenoid for power-efficient operation and heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the shutter blade is extended in the radial direction to cover a wide collection of laser beams, then the beam coverage is improved, but the moment of inertia increases and rigidity decreases
Solution Approach 1:
The shutter blade is reoriented from radial extension to axial extension (along the rotation axis). This dimensional change allows the blade to cover a wide collection of laser beams in the axial direction while maintaining a compact radial profile, thereby reducing the moment of inertia without compromising beam coverage capability.
2Adaptability or versatility
If the shutter blade is extended in the radial direction to cover a wide collection of laser beams, then the beam coverage is improved, but the rigidity is reduced
Solution Approach 1:
The blade geometry is changed from radial extension to axial extension. This reorientation places the blade's length along the rotation axis rather than radially outward, which maintains structural rigidity by keeping the mass distribution closer to the rotation axis while still providing adequate coverage for wide beam collections.
3Adaptability or versatility
If the shutter blade is made long to cover wide beam collection, then the beam coverage is improved, but the switching time increases
Solution Approach 1:
The blade is extended along the rotation axis rather than radially, which reduces the moment of inertia. This reduction in moment of inertia directly decreases the time required to accelerate and decelerate the blade during switching operations, thereby reducing switching time while maintaining beam coverage capability.
Solution Approach 2:
The reduced moment of inertia from the axial extension design minimizes mechanical vibrations during blade acceleration and deceleration. This reduction in vibrations further contributes to faster, more stable switching times without compromising the blade's ability to cover wide beam collections.
4Adaptability or versatility
If the shutter blade is made long to cover wide beam collection, then the beam coverage is improved, but the mechanical impact increases
Solution Approach 1:
By extending the blade along the rotation axis rather than radially, the moment of inertia is reduced. This reduction leads to lower acceleration forces and reduced mechanical impact on the shutter mechanism's bearings and drive system during switching operations, while the blade still provides adequate coverage for wide beam collections.
5Reliability
If the shutter operates in monostable mode with mechanical spring return, then the power-off safety is ensured, but the heat dissipation increases
Solution Approach 1:
The shutter operates in a bi-stable mode where it can remain in either the open or closed position without continuous power input. This periodic action pattern, combined with magnetic latching, eliminates the need for continuous spring return mechanisms that generate heat, while still ensuring power-off safety by maintaining a defined state.
6Adaptability or versatility
If the shutter blade is extended radially, then the beam coverage is improved, but the vibrations during switching increase
Solution Approach 1:
The blade is reoriented to extend along the rotation axis rather than radially. This dimensional change reduces the moment of inertia and minimizes the rotational mass that generates vibrations during acceleration and deceleration. The blade still provides adequate coverage for wide beam collections while producing significantly reduced mechanical vibrations during switching operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables fast shutter opening/closing times with reduced transients, controlled heat generation, and simultaneous blocking/unblocking of multiple beams, while maintaining stability and minimizing mechanical vibrations and power consumption.
Implementation Method 1
The rotatable body comprises at least a first plane reflective surface with a surface normal directed in a first direction perpendicular to the rotation axis
Data Source
Figure 1~2
Figure 3A~5
Figure 4A~4D
AI summary
A shutter (40) for a microlithography device, comprises a rotatable body (41), rotatable around a rotation axis (44), and a driving unit. The rotatable body has a length (L) along the rotation axis that is longer than a largest width (W). The rotatable body comprises at least a first plane reflective surface (42) with a surface normal directed in a first direction (N) perpendicular to the rotation axis. The first plane reflective surface is offset (O) from the rotation axis. The rotatable body leaves, for at least a part of the length, a free line-of-sight, passing the rotation axis, in a second direction (S) perpendicular to the rotation axis. The driving unit is configured for turning the rotatable body back and forth between a first rotational position and a second rotational position around the rotation axis. A microlithography device having a shutter is also disclosed.