Micromachined 6-Axis Inertial Sensor with Integrated Proof Mass
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Solution Overview
Problem
Conventional MEMS sensors can only measure either acceleration or rotation, not the 6 degrees-of-freedom of an object, leading to large form factors and high manufacturing costs due to the need for multiple sensors and extra circuits.
Innovation Solution
A micromachined integrated 6-axis inertial measurement device with a frame, planar proof mass sections, and flexures that measure angular rates and linear accelerations about three axes, reducing the form factor and manufacturing cost by integrating multiple sensing functions into a single device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple MEMS sensors are used to measure 6 degrees-of-freedom motion, then measurement capability is improved, but device form factor and manufacturing cost increase
Solution Approach 1:
The patent merges multiple MEMS sensor functions (accelerometer and gyroscope) into a single integrated device that measures all 6 degrees of freedom. The device combines three accelerometers and three gyroscopes in one package, eliminating the need for separate sensor assemblies and reducing overall device complexity while maintaining comprehensive motion measurement capability.
Solution Approach 2:
The integrated MEMS device performs multiple measurement functions simultaneously - it can detect linear accelerations and angular rates about all three axes through a unified structure. This multi-functional design allows a single device to replace what would traditionally require multiple separate sensors, directly addressing the contradiction between measurement capability and device complexity.
2Measurement precision
If multiple MEMS sensors are integrated with ASIC wafers, then measurement capability is improved, but manufacturing cost increases
Solution Approach 1:
The patent integrates multiple MEMS sensor structures and ASIC circuitry into a single wafer fabrication process. By combining the fabrication of accelerometers, gyroscopes, and their respective ASIC readout circuits into one manufacturing flow, the device eliminates the need for separate sensor assembly and integration steps, thereby reducing manufacturing cost while achieving 6 degrees-of-freedom measurement capability.
Solution Approach 2:
The device performs preliminary integration of all sensor elements and circuitry during the wafer fabrication process rather than requiring post-fabrication assembly. This preliminary action approach allows for optimized manufacturing workflows where all components are created simultaneously using standardized processes, reducing overall manufacturing complexity and cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of 6 degrees-of-freedom motion with a reduced form factor and manufacturing cost, enhancing the performance and efficiency of navigation and other electronic devices.
Implementation Method 1
a first planar proof mass section attached to the frame by a first flexure; and a second planar proof mass section attached to the frame by a second flexure
Data Source
AI summary
A micromachined inertial sensor with a single proof-mass for measuring 6-degree-of-motions. The single proof-mass includes a frame, an x-axis proof mass section attached to the frame by a first flexure, and a y-axis proof mass section attached to the frame by a second flexure. The single proof-mass is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.