Micromachining Method Using Dynamic Phase Modulation for High-Speed Marking

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Solution Overview

Problem

Current laser marking technologies face limitations in high production rate applications, particularly in industries like food-processing, pharmaceuticals, and electronics, due to issues with speed, stability, and energy efficiency, requiring complex and expensive setups or specific equipment.

Innovation Solution

A micromachining method and system using a spatially pulsed and time-coherent light beam with dynamic phase modulation to create patterns on materials with a reduced number of pulses, optimizing energy usage and maintaining industrial compatibility without the need for complex setups or specific equipment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional laser marking technologies are used with galvanometric mirrors and deflection heads, then marking capability is achieved, but execution speed and productivity are limited at high production rates

Engineering Contradiction:
Improvemarking speedVSAvoidexecution speed
Core Design Contradiction:
ProductivityVSSpeed

Solution Approach 1:

The laser beam is segmented into multiple independent sub-beams using a micromirror matrix, where each micromirror corresponds to a specific marking point. This allows simultaneous marking of multiple points in parallel, dramatically increasing productivity without requiring faster mechanical deflection of a single beam.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent replaces the mechanical galvanometric mirror deflection system with a static micromirror matrix that directs multiple beams simultaneously. This eliminates the speed limitations of rotating mirrors and mechanical deflection systems, achieving high-speed marking through optical parallelism rather than mechanical motion.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If amplitude mask technologies are used to shape the laser beam, then marking pattern is achieved, but energy loss occurs when the beam is blocked in zones that do not need marking

Engineering Contradiction:
Improvebeam shaping capabilityVSAvoidlaser energy loss
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

Instead of using a single amplitude mask that blocks unnecessary areas, the patent segments the beam into multiple sub-beams using a micromirror matrix. Each micromirror directs energy only to required marking points, eliminating energy waste from blocking entire zones and improving overall energy efficiency.

Inventive Principle:
Principle #1Segmentation

3Productivity

If micro-mirror matrices are used to divide the laser beam into sub-beams, then multi-point marking is achieved, but resolution is limited due to low micro-mirror resolution

Engineering Contradiction:
Improvemulti-point marking capabilityVSAvoidmarking resolution
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent uses femtosecond laser pulses with extremely short duration and high peak power to achieve precise material modification. The short pulse duration enables high resolution marking by confining the energy deposition to a very small temporal and spatial window, overcoming the resolution limitations of the micromirror matrix.

Inventive Principle:
Principle #35Parameter changes

4Ease of manufacture

If amplitude modulators are used for direct beam shaping, then marking pattern is achieved, but energy is partially absorbed or ejected

Engineering Contradiction:
Improvebeam shapingVSAvoidenergy absorption and ejection
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent replaces amplitude modulators that absorb or eject energy with a micromirror matrix that redirects beams through reflection. This mechanical/optical redirection system preserves laser energy by reflecting it to the desired locations without absorption losses, improving energy efficiency while achieving the same beam shaping effect.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly increases productivity by allowing complex markings in fewer pulses, reducing execution time, and maintaining system simplicity, while avoiding energy losses and the need for high pulse repetition rates, thus enhancing industrial applicability.

Implementation Method 1

Dynamic shaping of said spatially and temporally coherent pulsed light beam, in a modulation plane of a dynamic optical modulation device, by applying at least one phase modulation to shape said light beam according to the plurality of points forming the pattern

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Implementation Method 2

Focusing of the light beam thus shaped by means of a focusing device onto a surface of said material

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

a micromachining method for forming a pattern on a material

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS10350705B2Micromachining method for patterning a material
Publication Date: 2019.07.16 QIOVA
  • US10350705B2 patent drawing
  • US10350705B2 patent drawing
  • US10350705B2 patent drawing

AI summary

The present invention relates to a micromachining method for patterning a material. The pattern is made up of a plurality of points. Said method includes the following steps: —emitting a spatially and temporally coherent pulsed light beam; —dynamically shaping said spatially and temporally coherent pulsed light beam in a modulation plane of a dynamic optical modulation device by applying at least one phase modulation so as to shape said light beam in accordance with the plurality of points forming the pattern; and —focusing the thus-shaped light beam, by means of a focusing device, on one surface of said material placed within a working plane in a Fourier configuration relative to the modulation plane. In said method, patterning the material is carried out with a pulse train containing a finite number of pulses of said light beam that is strictly less than the number of points forming the pattern, and emission of the light beam is controlled so that each pulse has a predetermined pulse duration between 10 ps and 100 ns. The invention also relates to a micromachining system for implementing said method and to a method for using said system.