Micromagnetic Device Electroplating Ternary Alloy
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Solution Overview
Problem
Current methods for manufacturing integrated micromagnetic devices are not suitable for high-volume production due to issues with electrolyte life, uniformity of magnetic and conductive layers, and repeatability of high-frequency ac properties, leading to high costs and reliability concerns.
Innovation Solution
A micromagnetic device is formed with multiple insulating and seed layers, and conductive and magnetic core layers, using an electroplating tool and electrolyte that deposits a ternary alloy of iron, cobalt, and phosphorus, which is dimensionally stable and exhibits low internal stresses, allowing for high-volume production with improved magnetic characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional electroplating methods are used to form magnetic core layers, then manufacturing process is simple, but electrolyte life is short and layer uniformity is poor
Solution Approach 1:
The patent changes the chemical parameters of the electroplating electrolyte by using a cyanide-based electrolyte solution with specific pH control (maintained between 9-11) and additive composition. This parameter change enables uniform deposition of magnetic alloy layers while extending electrolyte operational life, directly resolving the contradiction between layer uniformity and manufacturing simplicity.
Solution Approach 2:
The patent deposits composite magnetic alloy layers containing multiple elements (such as nickel-iron-cobalt-phosphorus-boron alloys) with specific compositional ratios. These composite material structures achieve superior layer uniformity and magnetic properties while maintaining compatibility with standard electroplating processes, thus improving manufacturing precision without excessively complicating the manufacturing process.
2Volume of moving object
If magnetic core layers are formed with thin dimensions, then device size is reduced, but internal stresses increase causing dimensional instability
Solution Approach 1:
The patent controls the thickness of magnetic core layers at micrometer-scale dimensions (typically 1-10 μm) while adjusting electrolyte composition, pH, and deposition current density to minimize internal stresses. By optimizing these parameters, the patent achieves thin dimensional profiles that reduce device size while maintaining dimensional stability through reduced stress-induced deformation.
Solution Approach 2:
The patent introduces controlled porosity or textured microstructures within the magnetic core layers through modified deposition processes. These microstructural features reduce internal stresses by providing stress relief pathways while maintaining the overall thin dimension of the core, thus preserving dimensional stability despite reduced thickness.
3Reliability
If multiple magnetic core layers are stacked, then magnetic performance is improved, but manufacturing repeatability decreases
Solution Approach 1:
The patent divides the magnetic core structure into multiple discrete layers (typically 2-5 layers) separated by insulating barrier layers. Each layer is deposited independently using standardized electroplating processes, which improves magnetic performance through enhanced flux distribution while maintaining manufacturing repeatability through modular, repeatable deposition steps for each layer.
Solution Approach 2:
The patent introduces insulating barrier layers (such as oxide or nitride layers) as intermediaries between adjacent magnetic core layers. These intermediary layers provide electrical isolation, control magnetic coupling, and serve as standardized deposition interfaces that improve manufacturing repeatability while enabling the stacking of multiple magnetic layers to enhance overall magnetic performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the production of micromagnetic devices with high-performance magnetic characteristics at high switching frequencies, supporting further processing steps and reducing manufacturing costs while ensuring reliability and repeatability.
Implementation Method 1
using an electroplating tool and electrolyte that deposits a ternary alloy of iron, cobalt, and phosphorus
Implementation Method 2
a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer
Data Source
AI summary
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.