Micromechanical Actuator Controller Resonance Suppression
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing controllers for micromechanical actuators, such as MEMS mirrors, require high system bandwidth and computing power, leading to complex and costly implementations, and struggle to avoid exciting spurious resonance modes that degrade image quality in projector systems.
Innovation Solution
A modular multi-feedback controller structure with four linear controller elements: one filters and attenuates predefined frequency modes, another minimizes the deviation between reference and measuring signals, a third adapts the bandwidth, and a fourth generates a control signal by combining these adjustments to suppress resonance modes and reduce system complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high system bandwidth and computing power are used to control micromechanical actuators, then control precision and image quality are improved, but device complexity and implementation cost increase
Solution Approach 1:
The controller is divided into multiple independent modules: a resonance mode identifier that detects spurious resonance modes, a signal generator that creates drive signals, and a controller that combines these signals. This segmentation allows each module to perform a specific function with simpler logic, reducing overall controller complexity while maintaining control precision through coordinated operation of the modules.
Solution Approach 2:
An intermediate processing stage is introduced that identifies resonance modes and generates compensating signals before the final control output. This intermediary layer filters out spurious resonance components and adds corrective signals, improving control precision without requiring the main controller to handle all processing complexity directly.
2Productivity
If resonance modes are excited to achieve faster actuation, then productivity is improved, but harmful factors increase due to degraded image quality
Solution Approach 1:
The controller identifies spurious resonance modes that would normally degrade image quality and instead generates drive signals that intentionally excite these modes in a controlled manner. By converting the harmful resonance into a useful actuation mechanism, the system achieves faster productivity while the resonance modes no longer represent harmful distortions but rather controlled actuation pathways.
Solution Approach 2:
The controller generates periodic drive signals at frequencies corresponding to the identified resonance modes. This periodic excitation leverages the natural resonant frequencies of the micromechanical actuator to achieve faster actuation speeds, while the controlled nature of this periodic action prevents the uncontrolled spurious resonances that would degrade image quality.
3Measurement precision
If complex controllers with high computing power are implemented, then control precision is improved, but ease of manufacture deteriorates
Solution Approach 1:
The controller uses simple, easily manufacturable components with well-defined transfer functions rather than complex high-performance processors. The system achieves control precision through the coordinated operation of multiple simple modules with known characteristics, making the implementation easier to manufacture while maintaining the required precision through system-level design rather than relying on expensive individual components.
Data Source
AI summary
A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described.