Micromechanical Component With Intermediate Electrodes

The patent removes the counter-electrode from the sensor structure entirely. Instead of using a traditional capacitive sensor with two electrodes (measurement electrode and counter-electrode), the invention employs a single piezoelectric layer with electrodes only on the measurement side, eliminating the harmful counter-electrode that limited mobility and created air flow resistance.

The patent replaces the capacitive detection principle with a piezoelectric detection principle. Instead of measuring changes in capacitance between two electrodes, the invention uses the piezoelectric effect to directly convert mechanical stress from sound waves or pressure into electrical signals, eliminating the need for counter-electrodes and associated mechanical constraints.

The patent divides the piezoelectric structure into multiple layers with two distinct piezoelectric layers separated by intermediate electrodes and an intermediate volume. This segmentation allows the first piezoelectric layer to respond to applied force while the second piezoelectric layer responds to the mechanical stress transmitted through the intermediate structure, creating differential voltage outputs that enhance detection capability while the intermediate gap reduces parasitic capacitance.

The intermediate electrodes and intermediate volume (filled with insulating material or containing gaps) serve as mediators between the two piezoelectric layers. They mechanically couple the layers to transmit stress while electrically isolating them to reduce parasitic capacitance, thus improving voltage detection without requiring complex external circuitry.