Micromechanical Measuring Element Segmented Housing
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Solution Overview
Problem
Existing micromechanical pressure sensors require complex protective devices for electrical contacts due to exposure to corrosive or moist media, limiting their application and durability.
Innovation Solution
A micromechanical measuring element design featuring a sensitive silicon chip with a membrane and cap forming chambers accessible through specific openings, allowing media separation and pressure measurement at the chip level, eliminating the need for complex protective devices for electrical contacts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If protective devices are used to protect electrical contacts from media attacks, then reliability is improved, but device complexity increases
Solution Approach 1:
The housing is divided into a first housing part and a second housing part that are arranged coaxially and can be separated from each other. The first housing part contains the electrical contact, while the second housing part is exposed to the medium. This segmentation allows the electrical contact to be protected from direct media exposure while maintaining a functional pressure sensor design.
2Adaptability or versatility
If media feeds are arranged on opposite sides of the measuring element, then pressure measurement functionality is improved, but manufacturing complexity increases
Solution Approach 1:
The housing adopts an asymmetric design where the first and second housing parts are coaxially arranged but have different functions and positions. The first housing part is positioned to contain electrical contacts away from the medium, while the second housing part faces the medium for pressure application. This asymmetric arrangement enables opposite-side media feeds while simplifying the overall manufacturing process compared to traditional designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances durability and simplifies the housing by enabling media separation and pressure measurement without protecting contacting surfaces from media attacks, thus reducing manufacturing complexity and increasing chemical resistance.
Implementation Method 1
A pressure-dependent deformation of the membrane and the piezoresistive structures implanted in it, which are connected to form a Wheatstone bridge, for example, can result in a change in the electrical output voltage of the Wheatstone bridge as a result of the change in resistance of the piezoresistive structures
Implementation Method 2
The first medium can in particular be in direct contact with the upper side of the membrane and can transmit an applied pressure to the membrane
Data Source
Figure 1~2
Figure 3
AI summary
The invention relates to a micromechanical measuring element (1), which has a sensitive element (2), which comprises a membrane (21) having a bottom face (211) and a top face (212). Furthermore, the micromechanical measuring element (1) has a cap (3), which is connected directly to the sensitive element (2). The sensitive element (2) and the cap (3) form a first chamber (4), which has a first opening (5).