Micromechanical Mirror Device Anti-Stiction Support Structure
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Solution Overview
Problem
Existing micromechanical mirror devices for Fabry-Perot interferometers face challenges in maintaining high parallelism and preventing sticking issues, which affect their spectral tunability and optical performance across a wide wavelength range.
Innovation Solution
The introduction of a support structure with protruding sections acting as anti-stiction bumps, made from electrically insulating materials, which also provides mechanical rigidity and allows for electrical insulation of mirror elements, enabling better mechanical and electrical control of the mirror devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If mirror elements are made highly reflective using high-refractive-index materials, then optical performance is improved, but the risk of sticking between mirror elements increases
Solution Approach 1:
An electrically insulating intermediate layer is introduced between the high-refractive-index mirror elements. This intermediary layer prevents direct contact and sticking between the mirror elements while maintaining the optical performance provided by the high-refractive-index materials.
Solution Approach 2:
A sacrificial layer is used during manufacturing that can be selectively removed to create spacing between mirror elements. This disposable layer prevents sticking during operation after being removed to define the final cavity geometry.
2Stability of the object's composition
If support structures are added to maintain parallelism, then mechanical stability is improved, but device complexity increases
Solution Approach 1:
The support structure is merged with the electrically insulating layer, combining mechanical support functionality with electrical insulation in a single integrated component, thereby reducing overall device complexity.
Solution Approach 2:
The support structure serves multiple functions simultaneously: it maintains the parallelism of mirror elements, provides electrical insulation between high-refractive-index layers, and defines the cavity geometry. This multi-functionality reduces the need for separate components.
3Ease of manufacture
If mirror elements are bonded to the same substrate, then manufacturing is simplified, but control over individual mirror element positioning is reduced
Solution Approach 1:
The support structure is segmented into multiple regions with different thicknesses, allowing differential positioning control of mirror elements. This segmentation enables independent adjustment of cavity geometry while maintaining the benefit of bonding to a common substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the robustness and optical performance of the mirror devices by preventing sticking, maintaining parallelism, and allowing for spectral tuning, thereby improving the wavelength range and reflectivity of the Fabry-Perot interferometer.
Implementation Method 1
The at least one support structure has at least one section that protrudes from an outer surface of the first and/or the second mirror element. This section thus functions as a stop or as an anti-static friction bump.
Implementation Method 2
at least the relevant section of the at least one support structure acting as a stop is made of an electrically insulating material (insulator). This prevents electrodes from welding to the mirror elements during use of the mirror device
Implementation Method 3
a cavity consisting of two plane-parallel, highly reflective mirrors spaced apart (cavity length) in the optical wavelength range exhibits strong transmission only for wavelengths where the cavity length is an integer multiple of half the wavelength
Implementation Method 4
A commonly used design of mirror devices in miniaturized interferometers are dielectric layer systems made of alternating layers of high- and low-refractive-index materials, in particular distributed Bragg reflectors (DBRs)
Implementation Method 5
dielectric layer systems made of alternating layers of high- and low-refractive-index materials
Data Source
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AI summary
The invention relates to a micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device. The mirror device comprises a first mirror element (10), which is flat, and a second mirror element (20), which is flat, wherein: - the first and second mirror elements (10, 20) are arranged substantially plane-parallel; - an intermediate space (40) between the first and second mirror elements (10, 20) has a lower index of refraction than the first and/or the second mirror element (10, 20); - the first and second mirror elements (10, 20) are locally spaced apart from each other by at least one support structure (130); - the at least one support structure (130) overlaps with the first and second mirror elements (10, 20) in an axial direction (A), which is perpendicular to the first and second mirror elements (10, 20); and - the at least one support structure (130) has a material or is formed from a material that is different from a material from which the first and/or the second mirror element (10, 20) is formed.