Micromechanical Optical Element Spring Support Design

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Solution Overview

Problem

Conventional micromechanical optical elements with reflective surfaces suffer from dynamic deformation due to their moment of inertia and limited strength and stiffness, leading to undesirable influences on reflection behavior, especially at high oscillation frequencies, which cannot be adequately compensated by existing designs.

Innovation Solution

The optical element is held by multiple independent spring elements acting at various points, including the rotation axis, with strategically arranged points of action to distribute forces and torques, using a combination of torsion, bending, and torsion-bending springs with varying spring constants to minimize dynamic deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the strength and stiffness of the deflected element are increased to counteract dynamic deformation, then the deformation is reduced, but the mass increases requiring higher deflection forces

Engineering Contradiction:
Improvedynamic deformationVSAvoidmass
Core Design Contradiction:
Stability of the object's compositionVSWeight of moving object

Solution Approach 1:

The patent divides the single deflected element into multiple independent spring elements (at least two) that are arranged mutually opposite to each other. Each spring element is supported on the rotation axis and acts on the deflected element at specific points, distributing the mechanical load and reducing dynamic deformation without requiring a single heavy element

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The spring elements are positioned to act at specific local points on the deflected element, with at least one spring element acting at two points arranged at a distance from each other. This localized action allows precise control of deformation at critical areas while minimizing overall mass

Inventive Principle:
Principle #3Local quality

2Device complexity

If conventional single-point spring attachment is used, then the structure is simple, but dynamic deformation cannot be adequately compensated

Engineering Contradiction:
Improvespring attachment structureVSAvoiddynamic deformation compensation
Core Design Contradiction:
Device complexityVSStability of the object's composition

Solution Approach 1:

Instead of a single spring attachment point, the patent uses multiple independent spring elements (at least two) arranged mutually opposite, with each spring element supported on the rotation axis and acting on the deflected element at specific points, creating a segmented support system that better compensates for dynamic deformation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The spring elements are arranged in a spatial configuration around the rotation axis, with at least one spring element acting at two points arranged at a distance from each other. This multi-dimensional arrangement provides superior dynamic deformation compensation compared to conventional single-point attachment

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly reduces overall torque and dynamic deformation, maintaining planarity and reflection quality while allowing for efficient deflection of laser and light beams in various applications.

Implementation Method 1

spring elements which are supported mutually opposite on the rotation axis and act on the deflected element at in each case at least one point

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

deflected by means of electrostatic or electromagnetic forces

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 3

deflected by means of electrostatic or electromagnetic forces

Methodology Applied
Scientific EffectElectromagnetic force: Lorentz Force

Data Source

PatentUS7369288B2Micromechanical optical element having a reflective surface as well as its use
Publication Date: 2008.05.06 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
  • US7369288B2 patent drawing
  • US7369288B2 patent drawing
  • US7369288B2 patent drawing

AI summary

By way of example, it would also be possible to dispense in a manner which is not illustrated with the spring elements 2, and then for the element 1 to carry out an oscillating translational deflection. Micromechanical optical elements have a reflective surface which can be deflected electrostatically or electromagnetically in a known manner and which can be used for a large number of applications. The objective is to provide an element such as this at low cost and with improved dynamic deformation behaviour. The elements with a reflective surface are in this case held by spring elements, in which case the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements.