Micromechanical Resonator Radiation Sensor with Tilting Scanning
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Solution Overview
Problem
Existing infrared radiation sensors based on the Bolometer principle require large space and are expensive due to their array-like arrangement, which limits their economic production and speed in imaging applications.
Innovation Solution
A compact radiation imaging sensor using a micromechanical resonator as a detection element with a scanning device that tilts to detect radiation from different directions, integrated into a MEMS structure, allowing for high sensitivity to radiation intensity through shifts in resonance frequency, and utilizing a phase-locked loop for optimal operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If an array of radiation sensors is used for imaging radiation detection, then imaging capability is achieved, but space requirements increase and production cost increases
Solution Approach 1:
The patent segments the imaging function by using a single detection element that scans across the field of view through tilting movements, rather than using a complete array of detection elements. This allows imaging capability to be achieved with minimal space requirements.
Solution Approach 2:
The patent employs dynamic tilting of the detection element to redirect radiation from different directions onto the single detection element. This dynamic scanning approach enables imaging functionality without requiring a static array of multiple detectors, thereby reducing space requirements.
2Adaptability or versatility
If an array of radiation sensors is used for imaging radiation detection, then imaging capability is achieved, but production cost increases
Solution Approach 1:
The patent merges multiple functions (detection, scanning, and imaging) into a single integrated device. The detection element is combined with tilting mechanisms and scanning capabilities, eliminating the need for separate array components and reducing production costs.
Solution Approach 2:
The single detection element serves multiple purposes: it detects radiation intensity, participates in scanning across the field of view through tilting, and contributes to image formation. This multi-functionality reduces the number of components needed and simplifies manufacturing.
3Adaptability or versatility
If an array of radiation sensors is used for imaging radiation detection, then imaging capability is achieved, but imaging speed decreases
Solution Approach 1:
The patent employs periodic scanning movements of the detection element to systematically cover the field of view. This periodic scanning approach enables rapid sequential sampling of different spatial locations, achieving fast imaging performance.
Solution Approach 2:
The dynamic tilting and scanning capabilities allow the detection element to rapidly reposition and sample different regions of the field of view, enabling high-speed imaging without the overhead of processing signals from large arrays of simultaneous detectors.
4Measurement precision
If a micromechanical resonator is used as detection element, then sensitivity to radiation intensity is enhanced, but device complexity increases
Solution Approach 1:
The patent uses a micromechanical resonator that operates at its resonant frequency to detect radiation-induced temperature changes. The resonant oscillation amplifies the detection sensitivity, allowing precise measurement of radiation intensity while maintaining a relatively simple device structure.
Solution Approach 2:
The resonator's oscillation frequency or amplitude changes in response to radiation-induced temperature variations. By monitoring these parameter changes, the system achieves high sensitivity to radiation intensity with a straightforward measurement approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces space requirements, enhances sensitivity, and enables faster imaging with improved spatial resolution and economic production by leveraging high mechanical quality factors and efficient excitation methods, such as electrostatic drive, while maintaining high sensitivity to radiation variations.
Implementation Method 1
Such a radiation sensor works according to the bolometer principle. Bolometers detect electromagnetic radiation by absorbing the radiation, converting it into heat and quantitatively evaluating this quantity of heat.
Implementation Method 2
The incident infrared radiation is absorbed by this diaphragm, which causes the temperature of the diaphragm to increase.
Implementation Method 3
at least one excitation device, with which the detection element can be set into resonant oscillation
Implementation Method 4
at least one detection device with which a shift in the resonance frequency of the detection element under exposure to radiation can be detected
Implementation Method 5
The ability to tilt the device means that the detection element can be used to detect radiation from different directions. The scanning element can be tilted accordingly by means of a drive arrangement.
Data Source
AI summary
The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.