Micromechanical Rotational Rate Sensor Common Drive Mechanism
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Solution Overview
Problem
Current micromechanical rotational rate sensors for automotive applications, especially in complex systems like automated driving and two-wheeled vehicles, require robust three-axis sensors but often suffer from interference modes and misalignments when using multiple one-axis sensors, leading to faulty signals and increased complexity.
Innovation Solution
A micromechanical rotational rate sensor system that connects one-axis and two-axis sensors via a common drive mechanism, reducing interference modes and misalignments by using a single drive mechanism for all axes, and employing coupling devices and acquisition devices to suppress unwanted tilting and deflection phases, thereby enhancing robustness and simplifying packaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If three individual one-axis rotational rate sensors are used to create a three-axis sensor system, then the sensor can measure rotational rates along three axes, but the system becomes susceptible to interference modes and parasitic crosstalk due to multiple drive mechanisms operating at different frequencies
Solution Approach 1:
The patent merges three one-axis rotational rate sensor functions into a single integrated sensor core with one common drive mechanism. The sensor core contains detection structures that are each sensitive to more than one measurement axis, allowing three-axis measurement capability while using a single drive mechanism operating at one drive frequency. This eliminates parasitic crosstalk between multiple drive mechanisms and reduces interference modes.
2Adaptability or versatility
If three individual rotational rate sensors are used, then three-axis measurement is achieved, but the device complexity increases due to multiple drive mechanisms, connecting pads, wiring, and separate drive control circuits
Solution Approach 1:
The patent combines multiple sensor functions into a single sensor core with one drive mechanism. The sensor core includes detection structures that can detect rotational rates along multiple axes simultaneously. This integration reduces the number of drive mechanisms, connecting pads, wiring, and drive control circuits from three separate sensors to one unified system.
Solution Approach 2:
The detection structures in the sensor core are designed to be multi-functional, with each detection structure being sensitive to more than one measurement axis. This allows a single drive mechanism to drive all detection structures, and a single ASIC with one drive control circuit to control the entire three-axis sensor system.
3Adaptability or versatility
If multiple one-axis rotational rate sensors are packaged together, then three-axis measurement is possible, but misalignments between individual sensors occur leading to faulty signals
Solution Approach 1:
The patent integrates all three measurement axes into a single sensor core structure rather than packaging three separate sensors together. The detection structures are monolithically formed in the sensor core, ensuring precise alignment between all measurement axes. This eliminates misalignment issues that would occur when trying to package and align three separate one-axis sensors relative to one another.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a robust three-axis rotational rate sensor system that reduces interference modes, simplifies design, and avoids parasitic crosstalk, making it suitable for safety-critical automotive applications while maintaining precision and accuracy.
Implementation Method 1
a first spring device via which the first rotor device and the second rotor device are coupled in such a way that a parallel tilting about the second axis is suppressed and an anti-parallel tilting about the second axis is enabled
Implementation Method 2
a first rocker that is connected to the first and second rotor device via a first spring device, and a second rocker that is connected to the first and second rotor device via a second spring device
Implementation Method 3
A first acquisition device is used to acquire an antiparallel tilting of the first and second rotor device about the second axis
Data Source
AI summary
A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.


