Micromechanical Rotation Rate Sensor Quadrature Error Suppression
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Solution Overview
Problem
Micromechanical rotation rate sensors face interference signals due to manufacturing imperfections, leading to quadrature signals that increase noise and require high dynamic range and phase accuracy in signal processing.
Innovation Solution
A micromechanical rotation rate sensor with a compensation device at the seismic mass, controlled by a regulation device that demodulates and generates a compensation signal to reduce interference deflection, allowing for in-situ suppression of quadrature signals, thereby reducing noise and increasing resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional rotation rate sensors are used with manufacturing imperfections, then the sensor can be manufactured with standard tolerances, but quadrature interference signals increase noise and require high dynamic range in signal processing
Solution Approach 1:
The patent applies preliminary action by introducing a compensation device that generates counteracting forces before the quadrature interference signals can significantly degrade measurement accuracy. The compensation device is activated during operation to preemptively cancel out interference caused by manufacturing imperfections, allowing standard tolerances to be maintained while preventing harmful signal accumulation
Solution Approach 2:
The compensation device acts as an intermediary between the seismic mass and the measurement system. It introduces compensating forces that mediate the effect of manufacturing imperfections on the measurement, canceling out quadrature signals before they reach the detection device and thereby reducing noise without requiring higher manufacturing precision
2Object-affected harmful factors
If quadrature signals are suppressed electronically in conventional sensors, then interference can be reduced, but dynamic range requirements and phase accuracy demands increase
Solution Approach 1:
The patent converts the harmful quadrature interference signals into a beneficial compensation mechanism. By detecting the quadrature signals and using them to drive the compensation device, the system transforms the harmful interference into a useful control signal that generates counteracting forces, thereby reducing interference while simplifying the overall system rather than increasing complexity
3Object-affected harmful factors
If manufacturing imperfections are minimized to reduce quadrature signals, then interference decreases, but manufacturing costs and complexity increase
Solution Approach 1:
The sensor system performs self-service by automatically detecting and compensating for its own manufacturing imperfections. The compensation device uses feedback from the measured quadrature signals to generate appropriate counteracting forces, allowing the system to correct its own deficiencies without requiring external calibration or higher precision manufacturing processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the proportion of interference deflection in the total deflection signal, lowering noise and dynamic range requirements, and allows for adaptive compensation of changes over time, improving sensor accuracy and reducing manufacturing costs.
Implementation Method 1
a driving device which causes a driving vibration of the seismic mass in a first direction x
Implementation Method 2
a measuring device which measures a deflection of the seismic mass in a second direction y
Implementation Method 3
a measurement deflection, as a result of a Coriolis force
Data Source
AI summary
A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.