Micromechanical Sensor With Vibration-Resistant Stopper Elements

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Solution Overview

Problem

Micromechanical pressure sensors are sensitive to external vibrations, which can lead to inaccurate readings and potential damage due to direct contact with the carrier substrate or rupture of spring elements during oscillation.

Innovation Solution

A micromechanical device with a sensor device oscillatably connected to a carrier substrate via spring elements, featuring stopper elements that limit deflection and prevent direct contact, along with an evaluation device that measures capacitance to determine moisture levels and correct for vibration effects, ensuring accurate pressure measurement while protecting the sensor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the sensor device is directly mounted on the carrier substrate, then the structural stability is improved, but the sensor becomes sensitive to external vibrations and may suffer damage during oscillation

Engineering Contradiction:

Improvestructural stabilityVSAvoidvibration sensitivity

Core Design Contradiction:

Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

Spring elements are introduced as intermediary components between the sensor device and carrier substrate. These springs provide mechanical coupling for structural stability while simultaneously isolating the sensor from vibration shocks through their elastic deformation capability, thus resolving the contradiction between stability and vibration sensitivity

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Stopper elements are pre-positioned on both the sensor device and carrier substrate to establish predetermined contact points. These stoppers act as beforehand cushioning mechanisms that limit the amplitude of oscillation before damage can occur, allowing the spring elements to deflect freely within safe boundaries

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

2Object-affected harmful factors

If spring elements are used to decouple the sensor from vibrations, then the vibration sensitivity is reduced, but the risk of spring rupture and sensor damage increases during oscillation

Engineering Contradiction:

Improvevibration sensitivityVSAvoidcomponent reliability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

Stopper elements are designed to engage before the spring elements can undergo excessive deflection that would lead to rupture. By establishing predetermined contact points that limit oscillation amplitude, the stoppers perform preliminary anti-action against the harmful effect of over-deflection, thus protecting the springs and sensor while maintaining vibration decoupling

Inventive Principle:

Principle #9Preliminary anti-action

3Reliability

If the sensor device is allowed to oscillate freely, then the compensation for vibration effects is improved, but direct contact with the carrier substrate may occur causing damage

Engineering Contradiction:

Improvevibration compensationVSAvoidcontact damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

Stopper elements serve as intermediary boundary markers that define the safe oscillation envelope. They allow the sensor device to oscillate freely within this envelope for effective vibration compensation, while preventing contact with the carrier substrate by engaging first at predetermined points, thus maintaining both vibration compensation and damage prevention

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively decouples the sensor from external vibrations, preventing damage and ensuring accurate pressure measurement by using stopper elements to limit oscillation and an evaluation device to account for moisture and vibration-induced changes in capacitance.

Implementation Method 1

fastened to the carrier substrate with the aid of spring elements. The sensor device thus has a configuration that is oscillatable relative to the surface section

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

At least one stopper element that limits a deflection of the sensor device in the direction of the surface section is situated on the sensor device and/or on the surface section of the carrier substrate

Methodology Applied

Scientific EffectMechanical constraint: Mechanical Force

Implementation Method 3

an evaluation device that measures capacitance to determine moisture levels and correct for vibration effects

Methodology Applied

Scientific EffectCapacitance: Capacitance

Data Source

PatentUS11486782B2Micromechanical device and method for manufacturing a micromechanical device

Publication Date: 2022.11.01 ROBERT BOSCH GMBH

AI summary

A micromechanical device that includes a carrier substrate; a sensor device that is situated on the carrier substrate and spaced apart from a surface section of the carrier substrate with the aid of spring elements in such a way that the sensor device is oscillatable relative to the surface section; and at least one stopper element, situated on the sensor device and/or on the surface section of the carrier substrate, which limits a deflection of the sensor device in the direction of the surface section.