Micromirror Resonance Suppression With Adaptive Notch Filtering

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Solution Overview

Problem

Micromirrors in optical systems face performance issues due to mechanical resonant frequencies that can interfere with their functionality, varying across devices and over time due to aging and temperature changes, necessitating a targeted approach to suppress specific resonant frequencies.

Innovation Solution

A method involving the configuration of a notch filter tailored to the actual measured resonant frequency of the micromirror, using multiple actuation frequencies to determine the resonant frequency and selecting appropriate notch filter parameters to suppress only the frequency of concern, thereby minimizing performance impact while addressing device-to-device and runtime deviations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a wide notch filter range is used to suppress micromirror resonance, then resonance suppression effectiveness is improved, but actuation response delay increases

Engineering Contradiction:
Improveresonance suppression effectivenessVSAvoidactuation response delay
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies parameter changes by dynamically adjusting the notch filter parameters (center frequency and bandwidth) based on the measured resonant frequency of the micromirror. The system measures the actual resonant frequency and configures the notch filter parameters accordingly, changing from a fixed wide bandwidth approach to an adaptive narrow bandwidth approach that targets the specific resonant frequency, thereby reducing actuation response delay while maintaining suppression effectiveness

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements dynamics by making the notch filter configuration adaptive rather than static. The system continuously measures the micromirror's resonant frequency and updates the notch filter parameters in real-time, allowing the filter to dynamically adjust its characteristics to match the actual resonant conditions, thus optimizing both suppression effectiveness and response time

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If notch filter parameters are configured for all possible resonant frequencies, then device-to-device variation is covered, but frequency range suppression becomes unnecessarily wide

Engineering Contradiction:
Improvedevice-to-device variation coverageVSAvoidfrequency range suppression
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent uses parameter changes by configuring the notch filter parameters based on the measured resonant frequency of each specific micromirror device. Instead of using a fixed wide bandwidth that covers all possible frequencies, the system adjusts the center frequency and bandwidth parameters to precisely match the measured resonant frequency, thereby narrowing the suppressed frequency range while maintaining adaptability across devices

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by tailoring the notch filter characteristics to the specific resonant properties of each micromirror device. The system measures the actual resonant frequency and configures the filter parameters locally for that specific device, rather than using a universal wide bandwidth setting, thus optimizing the frequency range suppression for each device's specific characteristics

Inventive Principle:
Principle #3Local quality

3Area of stationary object

If the notch filter is configured to the actual measured resonant frequency, then the frequency range suppressed can be narrower, but the system must perform measurement and configuration steps

Engineering Contradiction:
Improvefrequency range suppressionVSAvoidmeasurement and configuration complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing resonant frequency measurement and notch filter configuration during the initialization or setup phase of the micromirror system. The system measures the resonant frequency in advance and configures the appropriate filter parameters before normal operation begins, thereby narrowing the frequency range suppression without adding complexity to the ongoing operational control

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves micromirror performance by narrowing the notch filter frequency range, reducing actuation response delay, and adapting to changes caused by aging and temperature, resulting in enhanced image quality and robustness across devices.

Implementation Method 1

Mechanical systems (including MEMS micromirrors) have mechanical resonant frequencies that depend on the geometry of the mechanical system

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

notch filter parameters are selected... The notch filter is then configured with the selected notch filter parameters... the frequency range suppressed by the notch filter may have a narrower frequency range

Methodology Applied
Scientific EffectNotch filter frequency suppression: Filter (electronic)

Data Source

PatentUS20230384582A1Micromirror resonance supression using configurable filter
Publication Date: 2023.11.30 MICROSOFT TECHNOLOGY LICENSING LLC
  • US20230384582A1 patent drawing
  • US20230384582A1 patent drawing
  • US20230384582A1 patent drawing

AI summary

The configuring of a micromirror to suppress a resonance of the micromirror. As part of the configuring process, the micromirror is subjected to multiple actuation frequencies, and the micromirror response is measured in response to at least some of these actuation frequencies. A resonant frequency of the micromirror is then determined using at least some of the measured mechanical responses. Then, depending on this determined resonant frequency of the micromirror, notch filter parameters are selected. There is more than one possibility for notch filter parameters, where the selected possibility depends on the determined resonant frequency. The notch filter is then configured with the selected notch filter parameters.