Micromirror Array Assembly with Independent Bidirectional Actuators
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Solution Overview
Problem
Current micromirror arrays are ineffective for use with extreme ultraviolet (EUV) radiation and lack applications for visible light or deep ultraviolet (DUV) radiation, requiring new technology for improved control of light shaping and intensity distribution.
Innovation Solution
A mirror assembly with deformable members featuring independently addressable first and second actuators that allow both pushing and pulling displacement of the mirror, enabling a wider range of rotation and simplifying manufacturing through a single process step for active portions of the actuators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single actuator is used to move the mirror, then the device complexity is reduced, but the range of mirror rotation is limited
Solution Approach 1:
The actuator system is segmented into two independently addressable actuators (first and second actuators) positioned at different locations on the deformable member. This segmentation allows each actuator to control different aspects of mirror movement, enabling bidirectional rotation and broader angular range while maintaining independent control for each direction
Solution Approach 2:
The deformable member serves multiple functions: it supports both first and second actuators, provides structural linkage between the actuators and mirror, and enables bidirectional mirror rotation through coordinated actuation. This multi-functionality reduces the need for separate mechanical components for each function
2Manufacturing precision
If deformable members with multiple actuators are used, then the control precision of mirror orientation is improved, but the manufacturing complexity increases
Solution Approach 1:
The first and second actuators are merged into a single deformable member structure rather than being separate components. This integration allows both actuators to be manufactured together in a single process step, reducing manufacturing complexity while maintaining the precision benefits of having two independently controlled actuation points
Solution Approach 2:
The deformable member's physical parameters (flexibility, structural geometry) are optimized to enable precise mirror orientation control through actuator deflection. By changing the material and structural parameters of the deformable member, the system achieves high control precision without requiring complex mechanical linkages
3Stability of the object's composition
If the mirror is constrained to reduce parasitic motion, then the stability of mirror position is improved, but the range of rotation is reduced
Solution Approach 1:
The system uses dynamic control of the deformable member to achieve stable mirror positioning during rotation. The deformable member flexes in a controlled manner during actuator deflection, allowing the mirror to rotate through a wide range while maintaining stability at each position. The dynamic flexibility of the deformable member compensates for the constraints needed to prevent parasitic motion
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The assembly enhances the potential range of mirror rotation, reduces parasitic motion, and simplifies manufacturing, making it suitable for EUV and other radiation wavelengths, including visible light and DUV, by allowing independent control of mirror orientation and position.
Implementation Method 1
an alternative embodiment of a programmable mirror array employs a matrix arrangement of tiny mirrors, each of which can be individually tilted about an axis, for example by applying a suitable localized electric field, or by employing electrostatic or piezoelectric actuation means
Data Source
AI summary
An assembly for movably supporting a mirror comprises: a mirror; and one or more deformable members. A first end of the or each deformable member defines a support portion and a second end of the or each deformable member is attached (either directly or indirectly to the mirror (for example on a rear surface of the mirror). The or each deformable member comprises a first actuator and a second actuator, the first and second actuators being independently addressable. Actuation of the first actuator moves the mirror relative to the support portion in a first direction and actuation of the second actuator moves the mirror relative to the support portion in a second direction that is opposite to the first direction. In use, the support portion may be attached or fixed to a support and the first and second actuators can be used to move the mirror relative to said support.