Micromirror Array Lens Encapsulation for Reflectivity Preservation

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Solution Overview

Problem

Existing micromirror array devices face issues with oxidation of metal coatings, degradation of reflective surfaces, protection from environmental factors, and complex fabrication processes, which affect their optical quality and mechanical integrity.

Innovation Solution

A Micromirror Array Lens with a sub coating layer and an over coating layer is introduced to protect the high reflective metal layer from oxidation, acid, base, and galvanic corrosion, while simplifying the fabrication process by encapsulating the metal layer and providing anti-reflective coatings for non-effective areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a metal layer is used for high reflectivity, then optical quality is improved, but the metal surface degrades by oxidation

Engineering Contradiction:

ImprovereflectivityVSAvoidoxidation resistance

Core Design Contradiction:

Illumination intensityVSReliability

Solution Approach 1:

An encapsulation layer is introduced as an intermediary between the metal layer and the environment. This encapsulation layer prevents direct contact between oxygen and the metal surface, thereby stopping oxidation while preserving the metal's high reflectivity properties.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The device structure is transformed from a single metal layer to a composite structure consisting of multiple layers: the metal layer for reflectivity and the encapsulation layer for oxidation protection. This composite approach allows simultaneous achievement of high reflectivity and oxidation resistance.

Inventive Principle:

Principle #40Composite materials

2Manufacturing precision

If anti-reflective coatings are applied to enhance optical properties, then image quality is improved, but the fabrication process becomes complex and difficult

Engineering Contradiction:

Improveimage qualityVSAvoidfabrication complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The encapsulation layer is designed to serve multiple functions simultaneously: it provides oxidation protection for the metal layer and also functions as an anti-reflective coating for the non-mirror surfaces. This multi-functionality eliminates the need for separate anti-reflective coating processes, thereby simplifying fabrication while maintaining image quality.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of manufacture

If the metal layer is exposed to environments, then fabrication is simpler, but reflectivity is slowly degraded by oxidation

Engineering Contradiction:

Improvefabrication simplicityVSAvoidreflectivity

Core Design Contradiction:

Ease of manufactureVSIllumination intensity

Solution Approach 1:

The encapsulation layer is applied during the fabrication process before the device is exposed to the environment. This preliminary protective action ensures that the metal layer is already protected against oxidation when the device begins operation, preventing reflectivity degradation without complicating the overall fabrication approach.

Inventive Principle:

Principle #10Preliminary action

4Reliability

If protective layers are added to protect reflective surface, then reliability is improved, but fabrication process becomes more complex

Engineering Contradiction:

Improveprotection qualityVSAvoidfabrication complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively preserves the reflectivity of micromirrors, protects mechanical structures, and enhances optical performance by reducing degradation and corrosion, while simplifying the fabrication process and improving the device's environmental resilience.

Implementation Method 1

the metal surface is degraded by oxidation. Since the metal layer was exposed to the environments, the reflectivity of the micromirror was slowly degraded by oxidation

Methodology Applied

Scientific EffectOxidation: Oxidation

Implementation Method 2

the micromirror array device has a reflectivity of metal. It has a good performance of light reflecting and modulating

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS7589884B2Micromirror array lens with encapsulation of reflective metal layer and method of making the same

Publication Date: 2009.09.15 STEREO DISPLAY INC

AI summary

The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.