Micromirror Array Non-Fixed Underlying Structures
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Solution Overview
Problem
Conventional micromirror structures with multi-axis rotational and translational motion require complex underlying structures and control methods, leading to increased production costs and limited motion coverage, making them inefficient and costly.
Innovation Solution
A micromirror array with non-fixed underlying structures that utilize a single principal rotational motion and optional translational motion to achieve multi-degrees of freedom motion, simplifying the structure and control system while maintaining high motion coverage and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If micromirror structures use multi-axis rotational and translational motion to generate arbitrary optical surface profiles, then the optical efficiency and motion coverage are improved, but the underlying structure becomes complicated and production cost increases
Solution Approach 1:
The micromirror array is segmented into multiple independently controllable micromirrors, each with a simplified single-axis rotational structure. By distributing the complexity across multiple simple units rather than requiring each unit to have complex multi-axis motion, the system achieves arbitrary optical surface profiles through coordinated control of many simple elements.
Solution Approach 2:
Each micromirror in the array has a localized simplified structure with single-axis rotation, while the overall system achieves complex optical surface profiles through the coordinated local motions of all micromirrors. The complexity is distributed locally rather than concentrated in each individual micromirror structure.
2Adaptability or versatility
If micromirror structures use multi-axis rotational and translational motion to achieve full range motion coverage, then the motion flexibility is improved, but the control system becomes complicated and production cost increases
Solution Approach 1:
The simplified single-axis rotational micromirror structure serves multiple functions: it can generate principal rotations, contribute to translational motion through coordinated array control, and form various optical surface profiles. This universal simple structure replaces the need for dedicated multi-axis mechanisms in each micromirror.
Solution Approach 2:
Instead of manufacturing complex multi-axis motion mechanisms in each micromirror, the patent uses identical or similar simple rotational structures that are copied across all micromirrors in the array. The complexity is achieved through control software that coordinates the copied simple units, rather than manufacturing complexity in each physical unit.
3Ease of manufacture
If the same underlying structure and orientation are used for all micromirrors, then the manufacturing process is simplified, but the motion coverage is limited
Solution Approach 1:
The micromirror array system transitions from static identical structures to dynamic coordinated control. While the physical structures remain identical and stationary, the system achieves variable motion coverage through dynamic control signals that activate different micromirrors in different patterns, effectively creating variable system behavior from fixed identical components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The simplified structure reduces operational voltages, fabrication complexity, and costs, while enhancing motion coverage and stability, allowing for more efficient and cost-effective micromirror arrays with independent control of each micromirror.
Implementation Method 1
The micromirror array with non-fixed underlying structures comprises a plurality of micromirrors. Each micromirror in the micromirror array with non-fixed underlying structures comprises a bottom layer having control circuitry, a micromirror having a top side and a bottom side, wherein the top side has a reflective surface and underlying structures for providing actuation force and restoration force for motion of the micromirror
Implementation Method 2
The underlying structures comprise at least one bottom electrode to provide electrostatic actuation force, at least one flexible structure to provide restoration force for the micromirror
Data Source
AI summary
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.