Micromirror Array with Transparent Substrate for Optical Path Control
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Solution Overview
Problem
Optical sensors with micromirror arrays face limitations in design flexibility and efficiency due to reliance on reflection states, lacking the ability to operate in transmission states without significant disadvantages such as increased space requirements and power consumption.
Innovation Solution
Incorporating a transparent substrate with micromirror elements that can be controlled to switch between reflection and transmission states, allowing for beam guidance without macroscopic mirrors, enabling compact, power-efficient, and maintenance-friendly operation with adjustable beam paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If movable macroscopic mirrors or beam splitters are used for beam guidance, then optical path control is achieved, but space requirements increase and device complexity increases
Solution Approach 1:
The patent divides the mirror surface into multiple micromirror elements (e.g., 8x8 array) that can be independently controlled. This segmentation allows compact arrangement of many controllable surfaces in a small space, replacing the need for large movable mirrors while maintaining optical path control versatility.
Solution Approach 2:
The patent replaces mechanical movable macroscopic mirrors with an electrically controlled micromirror array where micromirors are pivoted using electrostatic or electromagnetic forces. This substitution eliminates the need for large mechanical moving parts, reducing space requirements and device complexity while maintaining beam guidance capability.
2Adaptability or versatility
If movable macroscopic mirrors or beam splitters are used for beam guidance, then optical path control is achieved, but maintenance costs and difficulty increase
Solution Approach 1:
The patent replaces mechanical movable mirrors with electrically controlled micromirror elements that have no mechanical wear components. The micromirrors are pivoted using electrostatic or electromagnetic forces without physical contact, eliminating friction and wear, thus significantly reducing maintenance requirements and improving ease of repair.
Solution Approach 2:
The patent uses transparent substrates with micromirror elements that can be optically characterized. The transparent nature allows for optical inspection and diagnostics without disassembly, facilitating easier detection of issues and maintenance operations.
3Adaptability or versatility
If movable macroscopic mirrors or beam splitters are used for beam guidance, then optical path control is achieved, but power consumption increases
Solution Approach 1:
The patent replaces mechanically driven mirrors with electrically controlled micromirror elements. The electrostatic or electromagnetic actuation requires minimal power compared to mechanical motors or actuators, significantly reducing power consumption while maintaining the ability to control multiple optical paths.
Solution Approach 2:
The patent employs periodic switching of micromirror elements between different states (e.g., reflective and transparent positions) to achieve temporal multiplexing of optical paths. This periodic action allows a single compact micromirror array to perform functions that would otherwise require multiple continuously operating mechanical mirrors, reducing overall power consumption.
4Ease of operation
If micromirror array operates in reflection mode, then beam deflection is achieved, but design flexibility is limited
Solution Approach 1:
The patent designs the micromirror array with transparent substrates and transparent electrodes, enabling the same device to operate in both reflective mode (for beam deflection) and transmissive mode (for beam guidance without deflection). This multi-functionality greatly enhances design flexibility, allowing a single component to replace multiple specialized optical elements.
Solution Approach 2:
The patent implements dynamic control of micromirror elements, allowing each micromirror to be independently switched between reflective and transparent states. This dynamic reconfigurability enables the optical system to adapt its behavior in real-time, providing both beam deflection and straight-through transmission capabilities from a single static physical structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for a compact, cost-effective, and reliable optical sensor with extended design possibilities, enabling precise beam control and unattenuated light detection for reference and regulation purposes, reducing data gaps and enhancing measurement reliability.
Implementation Method 1
Micromirror arrays are typically operated exclusively in reflection in optical sensors. The two functional states of the mirror unit in this respect correspond to different angles of reflection, that is the incident light is deflected to a different extent depending on the functional state.
Implementation Method 2
the control device is configured to temporarily set the mirror unit into a transmission state in which the micromirror elements are in an open position and light radiation incident onto the mirror unit moves past the micromirror elements through the transparent substrate
Data Source
AI summary
An optical sensor comprises a light transmitter; a light receiver; an evaluation unit; at least one mirror unit that comprises a plurality of micromirror elements having an at least regionally reflective surface and comprising an electrode arrangement connected to the micromirror elements; and a control device that is configured to adjust the mirror unit between at least two different functional states by controlling the electrode arrangement. The mirror unit comprises an at least substantially transparent substrate at which the micromirror elements are arranged. The control device is configured to temporarily set the mirror unit into a transmission state in which the micromirror elements are in an open position and light radiation incident onto the mirror unit moves past the micromirror elements through the transparent substrate.


