Micro-Mirror Array Control for Spring Stiffness Variation
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Solution Overview
Problem
Precision limitations in the fabrication of micro-mirror arrays for light steering systems lead to component variations, resulting in non-uniform rotations and reduced imaging/ranging resolution due to differences in spring stiffness among micro-mirror assemblies.
Innovation Solution
A controller is used to generate and adjust control signals for each micro-mirror assembly based on its target rotation angle and spring stiffness, accounting for variations in the connection structures, such as torsion bars or springs, to ensure uniform rotation and improve imaging/ranging resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If uniform control signals are applied to all micro-mirror assemblies, then the control system is simple, but component variations cause non-uniform rotations and degraded performance
Solution Approach 1:
The patent applies local quality by assigning individualized control parameters to each micro-mirror assembly based on its measured spring stiffness characteristics. Instead of uniform control, each assembly receives customized control signals that account for its specific mechanical properties, thereby achieving uniform rotation performance across all assemblies despite manufacturing variations.
Solution Approach 2:
The patent changes the control parameter from a single uniform signal to multiple assembly-specific parameters (control voltages adjusted according to measured spring stiffness). By measuring and compensating for parameter variations in spring stiffness, the system achieves uniform rotation behavior across all micro-mirror assemblies.
2Manufacturing precision
If individualized control signals are generated for each micro-mirror assembly based on spring stiffness measurements, then rotation uniformity is improved, but the control system becomes more complex
Solution Approach 1:
The patent implements preliminary action by measuring the spring stiffness of each micro-mirror assembly during the manufacturing process and storing these measurements for later use. This pre-characterization allows the system to compensate for manufacturing variations without requiring complex real-time measurements during operation, thereby reducing overall system complexity while maintaining high rotation uniformity.
3Manufacturing precision
If spring stiffness variations among micro-mirror assemblies are not compensated, then the device is simpler to manufacture, but imaging and ranging resolution are reduced
Solution Approach 1:
The patent implements feedback by measuring the spring stiffness of each micro-mirror assembly and using these measurements to adjust the control signals. This closed-loop approach compensates for manufacturing variations in connection structures, thereby achieving high imaging and ranging resolution without requiring extremely precise fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adaptive control system enhances the uniformity of micro-mirror rotations, reducing light dispersion and improving the imaging/ranging resolution by accounting for variations in spring stiffness, thereby enhancing the robustness and performance of light steering systems.
Implementation Method 1
a micro-mirror connected to a substrate via an elastic connection structure and rotatable around the connection structure
Implementation Method 2
a connection structure (e.g., a torsion bar, a spring, etc.) to form a pivot
Data Source
AI summary
Systems and methods for operating an array of micro-mirror assemblies are provided. In one example, an apparatus comprises: a light source; a receiver; and a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a controller, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror connected to a substrate of the semiconductor integrated circuit via an elastic connection structure and rotatable around the connection structure to perform at least one of: reflect light from the light source along an output projection path, or reflect input light propagating along an input path to the receiver. The controller is configured to generate a control signal to rotate the micro-mirrors based on a target rotation angle and a spring stiffness of one or more connection structures of the array of micro-mirror assemblies.