Micromirror Array Coupling for Dynamic Deformation Control
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Solution Overview
Problem
Micromirrors in rapid movement systems often experience dynamic deformation due to overshooting, leading to a non-planar mirror surface which affects mirroring performance in applications like projectors.
Innovation Solution
A micromirror array design featuring first and second supporting elements with specific coupling elements that introduce force in a pointwise manner, minimizing overshoot through precise mechanical coupling and using an SOI wafer for precise thickness control and independent patterning of silicon and oxide layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the mirror membrane is mechanically coupled at multiple points to reduce dynamic deformation, then the mirroring performance is improved, but the device complexity increases due to multiple supporting elements and coupling elements
Solution Approach 1:
The supporting structure is segmented into multiple discrete supporting elements (first and second supporting elements) distributed across the mirror membrane, with coupling elements connecting them. This segmentation allows localized force application points that reduce dynamic deformation while maintaining overall structural integrity, resolving the contradiction between performance and complexity.
Solution Approach 2:
The patent implements a nested structure where first supporting elements are coupled to the mirror membrane, second supporting elements are coupled to the first supporting elements, and coupling elements connect these layers. This nested arrangement enables complex mechanical coupling with controlled force distribution, improving mirroring performance while organizing complexity in a hierarchical manner.
2Speed
If rapid movement of the micromirror is achieved, then the speed is improved, but dynamic deformation occurs causing the mirror surface to become non-planar
Solution Approach 1:
The patent pre-configures multiple supporting elements and coupling elements in specific positions and orientations before operation. This preliminary structural arrangement ensures that during rapid movement, forces are distributed through predetermined pathways that maintain mirror planarity, allowing high speed operation without dynamic deformation.
Solution Approach 2:
The patent modifies structural parameters including the thickness, spacing, and mechanical properties of supporting elements and coupling elements. These parameter changes optimize the structure's dynamic response characteristics, enabling rapid movement while maintaining mirror surface planarity through controlled force distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively reduces dynamic deformation of the mirror membrane, enhancing the stability and performance of micromirror arrays in dynamic movements by precise force distribution and manufacturing methods.
Implementation Method 1
a first coupling element that is located between the mirror membrane and the particular first supporting element and formed to mechanically couple the particular first supporting element to the mirror membrane
Implementation Method 2
Piezoelectric methods or the like can be used
Data Source
AI summary
A micromirror array is provided having a mirror membrane, including a first supporting element, including for each first supporting element, a first coupling element that is located between the mirror membrane and the particular first supporting element and is formed to mechanically couple the particular first supporting element to the mirror membrane; having at least one second supporting element that is mechanically coupled to the at least one first supporting element; and having a second coupling element for each second supporting element that is formed to be mechanically contacted. Also a method for manufacturing a micromirror array according to the present inventions described.