Micromirror Guiding Device Linear Drive Oscillation Control
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Solution Overview
Problem
Conventional micromirrors experience undesirable oscillations and energy dissipation due to mass movements in the z-direction, leading to amplified deformations in the carrier structure, which affects their operational efficiency.
Innovation Solution
A micromirror device with a guiding device that restricts the movement of the drive element to a straight line parallel to the mirror's plane, using springs with varying stiffness to facilitate movement in the desired direction while minimizing oscillations, and a magnet device to generate a magnetic field for linear movement without direct contact, enabling efficient rotational movement of the mirror.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional micromirror drive methods are used with mass components (magnets, coils, adhesive surfaces), then the mirror can be tilted in one or two directions, but undesirable oscillations and energy dissipation occur due to plastic deformation in connecting parts
Solution Approach 1:
The patent extracts and removes the heavy mass components (magnets, coils, large adhesive surfaces) from the micromirror drive system. Instead, it uses a lightweight capacitive drive arrangement with minimal mass, consisting of a drive electrode and sense electrode structure that eliminates the need for heavy magnetic components, thereby reducing oscillations and energy loss
Solution Approach 2:
The patent replaces the mechanical magnetic drive system with an electrostatic capacitive drive system. The drive mechanism uses electric fields between electrodes rather than magnetic fields and mechanical moving masses, substituting a lightweight electrical system for a heavy mechanical one, which reduces plastic deformation and energy dissipation
2Ease of operation
If mass movements in the z direction are allowed in the drive arrangement, then the mirror can be driven, but amplified oscillations and deformations occur in the carrier structure
Solution Approach 1:
The patent segments the drive function into separate electrical components (drive electrode, sense electrode) that operate in fixed positions without mass movement. The capacitive coupling allows electrical actuation without mechanical displacement of heavy components, preventing z-direction mass movements that would amplify oscillations in the carrier structure
Solution Approach 2:
The patent introduces an electrical field as an intermediary between the control signal and the mirror. Instead of directly moving mass components in the z direction, the electric field mediates the actuation through electrostatic forces on the membrane, eliminating the need for z-direction mass movements that cause carrier structure deformations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly reduces oscillations and deformations, allowing for precise control of the mirror's movement, enabling frequencies of over 10 kHz and improving the conversion of linear to rotational movement, thus enhancing the micromirror's operational stability and efficiency.
Implementation Method 1
a magnet device (12), the drive element (3) comprising an electrical coil (13), the magnet device (12) being designed to generate a magnetic field (14), which exerts a force on the coil (13)
Implementation Method 2
the guiding device (5) has at least one first spring (9-1 to 9-n), in particular a leaf spring, which has the lowest spring stiffness in the direction of the straight line
Data Source
AI summary
A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.