Micromirror Structure with Perpendicular Hinge Axes
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Solution Overview
Problem
Existing micromirror structures face challenges in maintaining precise positioning during deflection, leading to potential mechanical crosstalk and imprecision in thermoelectric MEMS micromirror arrays used in optical communications.
Innovation Solution
A micromirror structure with a pair of first hinges and second hinges forming perpendicular rotation axes, where the first driver module drives the inner frame and lens using the second rotation axis, and the second driver module drives the lens using the first rotation axis, ensuring independent and precise rotations without mechanical crosstalk, utilizing thermoelectric driving arms for deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a micromirror structure uses a single rotation axis for deflection, then the structure is simpler, but mechanical crosstalk occurs between deflection directions and positioning precision deteriorates
Solution Approach 1:
The micromirror structure is segmented into two independent rotational systems: a first rotation axis for primary deflection and a second rotation axis for secondary deflection. Each axis has its own driver module and hinge mechanism, allowing independent control without mechanical crosstalk. This segmentation enables precise positioning in two-dimensional space while maintaining structural clarity and avoiding interference between deflection directions.
2Manufacturing precision
If the lens is constrained by hinges during rotation, then positioning precision is improved, but the lens may experience mechanical stress or displacement
Solution Approach 1:
The hinge structures serve as intermediary elements between the lens and the rotation axes. These hinges are specifically designed to provide controlled constraint during rotation, allowing the lens to deflect precisely along the desired path while accommodating thermal expansion and minimizing mechanical stress. The hinge acts as a mediator that translates rotational motion into precise lens positioning without transmitting excessive stress to the lens.
3Force
If thermoelectric driving arms are used for deflection, then driving force and displacement are enhanced, but control precision may be compromised due to thermal deformation
Solution Approach 1:
The thermoelectric driving arms utilize parameter changes in temperature to generate controlled thermal deformation, which translates into precise lens deflection. By carefully designing the thermal characteristics of the driving arms and controlling the temperature change parameters, the system achieves both strong driving force and precise control. The perpendicular rotation axes further decouple the control dimensions, allowing independent optimization of each axis's thermal response for maximum precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures precise positioning and deflection of the micromirror, maintaining the fixedness of rotation axes and preventing unwanted offsets, thereby enhancing the precision and efficiency of the micromirror array chip in optical switching applications.
Implementation Method 1
A thermoelectric MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system) driving technology is a technology of generating driving force through thermal deformation of a material
Data Source
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AI summary
A micromirror structure and a micromirror array chip are disclosed. The micromirror structure includes an outer frame (10), an inner frame (20), a lens (30), a pair of first hinges (40), a pair of second hinges (50), a first driver module, and a second driver module. The pair of first hinges is oppositely disposed, and is respectively connected between two ends of the lens and an inner wall of the inner frame, and a connection line of the pair of first hinges forms a first rotation axis (A1). The pair of second hinges is oppositely disposed, and is respectively connected between an outer wall of the inner frame and an inner wall of the outer frame, a connection line of the pair of second hinges forms a second rotation axis (A2), and the first rotation axis is perpendicular to the second rotation axis. The first driver module is connected to the inner frame, to drive the inner frame, together with the lens, to rotate by using the second rotation axis as a center. The second driver module is connected to the lens, to drive the lens to rotate by using the first rotation axis as a center. The micromirror structure can prevent the lens from moving in a direction perpendicular to the lens when the lens rotates, thereby ensuring a precise position of the lens in a rotation process.