Micromirror Abnormality Detection Using Piezoelectric Signal Fluctuation

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Solution Overview

Problem

Existing methods for detecting abnormal operations in micromirror devices, such as those used in LiDAR and HUD, are unable to do so at high speed due to the need to acquire and evaluate waveforms for one swing period, limiting their effectiveness in identifying dangerous conditions where laser light is continuously emitted to the same position.

Innovation Solution

An optical scanning device and method that utilizes a micromirror device with a piezoelectric element to detect abnormal operations based on temporal fluctuations in an output signal, employing a control device to resonate the mirror at a fixed swing period and a detection device to analyze signal fluctuations within a time interval shorter than 10% of the swing period, using a delay circuit and differential amplification to determine abnormality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If abnormality detection is performed based on current flowing through piezoelectric portion or separate detection piezoelectric portion, then detection coverage includes short circuit abnormalities, but other types of abnormalities cannot be detected

Engineering Contradiction:
Improveabnormality detection coverageVSAvoiddetection method applicability
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The piezoelectric element is designed to serve multiple functions: it acts as both the actuator that drives mirror oscillation and the sensor that detects abnormalities through electromotive force generation. This multi-functional design allows the system to detect various types of abnormalities (short circuit, open circuit, mechanical failures) without requiring separate detection components, thereby improving both detection coverage and method applicability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system uses the piezoelectric element's inherent ability to generate electromotive force during oscillation to detect abnormalities. The same component that performs the actuation function also provides the detection function through its electrical characteristics, eliminating the need for external detection systems and enabling versatile abnormality detection across different failure modes.

Inventive Principle:
Principle #25Self-service

2Measurement precision

If waveform acquisition and evaluation for one swing period is performed to detect mirror amplitude, then detection accuracy is improved, but abnormal operation cannot be detected at high speed

Engineering Contradiction:
Improvemirror amplitude detection accuracyVSAvoidabnormality detection speed
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The patent extracts only the essential detection information (electromotive force fluctuations) from the piezoelectric element without requiring complete waveform acquisition over a full swing period. By focusing on specific electrical characteristic changes rather than analyzing entire waveforms, the system achieves high-speed abnormality detection while maintaining sufficient detection accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of performing complete waveform evaluation for one swing period, the system uses partial action by detecting electromotive force fluctuations that occur during abnormal operations. This partial detection approach enables rapid identification of abnormalities without the time-consuming process of acquiring and analyzing full waveforms, thereby achieving high-speed detection.

Inventive Principle:
Principle #16Partial or excessive action

3Measurement precision

If phase difference or amplitude detection is performed by acquiring waveform for one swing period, then detection accuracy is improved, but high-speed detection is not achieved

Engineering Contradiction:
Improvephase difference and amplitude detection accuracyVSAvoidtime for waveform acquisition
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the mechanical/optical detection approach (waveform acquisition and phase/amplitude analysis) with an electrical detection method. By measuring electromotive force fluctuations from the piezoelectric element, the system directly detects abnormalities without requiring time-consuming waveform acquisition and analysis, thus reducing time loss while maintaining detection accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system continuously monitors the electromotive force output from the piezoelectric element during normal operation. When an abnormality occurs, the pre-existing monitoring system immediately detects the electromotive force fluctuations, enabling rapid response without the delay of acquiring waveforms after abnormality detection is initiated.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid detection of abnormal mirror operations, preventing dangerous continuous laser emission by identifying deviations in the output signal within a fraction of the swing period, thereby ensuring user safety.

Implementation Method 1

a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS12572007B2Optical scanning device and abnormality detection method
Publication Date: 2026.03.10 FUJIFILM CORP
  • US12572007B2 patent drawing
  • US12572007B2 patent drawing
  • US12572007B2 patent drawing

AI summary

An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, an actuator that allows the mirror to swing, and a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror; a control device configured to control an operation of the actuator; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount in an output signal from the piezoelectric element.