Micromirror Abnormality Detection via Position Signal Fluctuations

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Solution Overview

Problem

Existing optical scanning devices, such as those used in LiDAR and HUD systems, face challenges in detecting abnormal operations of micromirrors at high speeds, as current methods require acquiring and evaluating waveforms over one swing period, leading to slow detection of amplitude deviations.

Innovation Solution

An optical scanning device comprising a micromirror device, a control device, a light irradiation device, a detection device, and an abnormality detection device that uses temporal fluctuations in position signals to detect abnormal operations, with a position sensitive detector and a differential amplification circuit to determine deviations within specific time intervals, enabling rapid detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the amplitude of the mirror is monitored by acquiring and evaluating a waveform for one swing period, then the abnormal operation can be detected, but the detection speed is slow

Engineering Contradiction:
Improveabnormal operation detection accuracyVSAvoiddetection speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent segments the swing period into multiple time intervals and processes position signals from each interval independently. Instead of waiting for one complete swing period to detect abnormalities, the system divides the period into segments and evaluates each segment separately, enabling faster detection of amplitude deviations without compromising reliability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent accumulates position signals from multiple time intervals in advance and performs comparative evaluation before a complete swing period elapses. By preparing the data structure and performing preliminary calculations on accumulated signals, the system can quickly determine when amplitude falls outside the predetermined range, achieving both high speed and high reliability

Inventive Principle:
Principle #10Preliminary action

2Speed

If the mirror operation is monitored continuously, then abnormal operations can be detected quickly, but the system complexity increases

Engineering Contradiction:
Improvedetection speedVSAvoiddetection system complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent introduces a position signal as an intermediary that indirectly reflects mirror amplitude. Instead of directly measuring mirror position at multiple points, the system uses a single position signal from a light-receiving element that varies with mirror amplitude. This intermediary approach enables continuous monitoring without adding complex direct measurement mechanisms

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent implements a feedback mechanism where the position signal is continuously compared against accumulated signals from previous time intervals. The abnormality detection device uses this feedback loop to automatically determine when amplitude deviations occur, maintaining simple hardware while achieving continuous monitoring through intelligent signal processing

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-speed detection of abnormal mirror operations by analyzing position signal fluctuations, improving detection speed and accuracy while minimizing false positives and negatives.

Implementation Method 1

a light irradiation device configured to irradiate a back surface of the mirror on a side opposite to the reflecting surface with illumination light; a detection device to which reflected light of the illumination light that has been reflected by the mirror is incident

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

the detection device is a position sensitive detector capable of detecting a light quantity centroid position of the incidence light

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP4270085B1Optical scanning device and abnormality detection method
Publication Date: 2025.03.26 FUJIFILM CORP
  • EP4270085B1 patent drawingFigure 1
  • EP4270085B1 patent drawingFigure 2
  • EP4270085B1 patent drawingFigure 3~4

AI summary

Provided are an optical scanning device and an abnormality detection method with which an abnormal operation of a mirror can be detected at high speed during the operation. An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, and an actuator that allows the mirror to swing; a control device configured to control an operation of the actuator; a light irradiation device configured to irradiate a back surface of the mirror on a side opposite to the reflecting surface with illumination light; a detection device to which reflected light of the illumination light that has been reflected by the mirror is incident and configured to output a position signal representing a position of the incidence light; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount of the position signal.