2D Scanning Micromirror Resonant Oscillation Control

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Solution Overview

Problem

Digital micromirror devices used in image projection systems require large and high-intensity light sources, limiting their compactness and efficiency, and often result in projection artifacts due to sinusoidal light paths that cause tilt and uneven line spacing.

Innovation Solution

The development of two-dimensional scanning micromirror devices that utilize resonant oscillations and specific structural geometries to control light in two directions, allowing for reduced power consumption and the ability to direct light along non-sinusoidal paths, thereby reducing projection artifacts and improving image display quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If digital micromirror devices use large and high intensity light sources to project full color images, then image projection quality is improved, but device compactness deteriorates

Engineering Contradiction:
Improvelight source intensityVSAvoiddevice compactness
Core Design Contradiction:
Illumination intensityVSVolume of moving object

Solution Approach 1:

The patent employs resonant oscillation of the micromirror device to achieve efficient light modulation. By driving the micromirror at its resonant frequency, the system achieves effective light control with minimal drive power, eliminating the need for high-intensity light sources and enabling compact device design.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The micromirror device operates through periodic resonant oscillation cycles, switching between stable oscillation and decay phases. This periodic operation allows efficient light projection during the oscillation phase while consuming minimal power during decay, enabling compact design without sacrificing projection quality.

Inventive Principle:
Principle #19Periodic action

2Use of energy by moving object

If micromirror devices operate at resonant frequency to reduce power consumption, then energy efficiency is improved, but control precision deteriorates

Engineering Contradiction:
Improvepower consumptionVSAvoidlight control precision
Core Design Contradiction:
Use of energy by moving objectVSMeasurement precision

Solution Approach 1:

The system dynamically switches between resonant oscillation mode for efficient light modulation and decay mode for precise control. During oscillation, the mirror achieves large angular deflection with minimal power; during decay, the system gains precise control over the mirror position, thereby maintaining both energy efficiency and control precision.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent maintains continuous useful action by seamlessly transitioning between oscillation and decay phases. The resonant oscillation provides continuous light modulation during the oscillation phase, while the decay phase provides continuous precise control, ensuring both energy efficiency and precision are maintained throughout operation.

Inventive Principle:
Principle #20Continuity of useful action

3Device complexity

If micromirror devices use sinusoidal light paths for simple oscillation control, then device complexity is reduced, but image quality deteriorates due to tilt and uneven line spacing

Engineering Contradiction:
Improveoscillation control complexityVSAvoidline spacing uniformity
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The system uses periodic switching between resonant oscillation and decay phases to generate non-sinusoidal light paths. During the oscillation phase, the mirror produces large angular deflection; during the decay phase, the mirror returns to center position with precise control. This periodic action creates trapezoidal or triangular scan patterns that eliminate tilt and ensure uniform line spacing while maintaining relatively simple device architecture.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The two-dimensional scanning micromirror devices achieve lower power operation and improved image display by directing light along non-sinusoidal paths, reducing tilt and ensuring uniform line spacing, thus enhancing the compactness and efficiency of image projection systems.

Implementation Method 1

The support flexures can comprise resilient structures that allow for supporting various components from or by one another and coupling various components to one another, while allowing motion

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

The disclosed two-dimensional scanning micromirror devices can make use of resonant oscillations to reduce or limit the power consumption by the devices

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 3

the second platform including a reflector... controlling oscillations of reflected light in a second direction

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS20240361589A1Two-dimensional micro-electrical mechanical system mirror and actuation method
Publication Date: 2024.10.31 MAGIC LEAP INC
  • US20240361589A1 patent drawing
  • US20240361589A1 patent drawing
  • US20240361589A1 patent drawing

AI summary

A two-dimensional scanning micromirror device includes a base, a first platform coupled to the base by first support flexures, and a second platform including a reflector and coupled to the first platform by second support flexures. The first platform is oscillatable about a first axis and the second platform is oscillatable about a second axis orthogonal to the first axis. The first platform, the second platform, and the second support flexures together exhibit a first resonance having a first frequency, the first resonance corresponds to oscillatory motion of at least the first platform, the second platform, and the second support flexures about the first axis. The first platform, the second platform, and the second support flexures together exhibit a second resonance having a second frequency, and the second resonance corresponds to oscillatory motion of at least the second platform about the second axis.