Scanning Micromirror Rim Structure for Low Dynamic Deformation
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Solution Overview
Problem
Existing beam scanning devices suffer from dynamic deformation due to rotational inertia, which affects the accuracy of light reflection, especially in applications requiring high spatial resolution and large-diameter reflective surfaces like LIDAR.
Innovation Solution
A scanning micromirror design incorporating a rim, spring, and connectors with specific connection elements that reduce dynamic deformation by balancing rotational inertia through a combination of rim reinforcement and extended connection members, enhancing the structural integrity of the reflective surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a large-diameter reflective surface is used to improve light reflection accuracy for high spatial resolution applications, then the scanning scope and resolution are improved, but dynamic deformation increases due to rotational inertia
Solution Approach 1:
The reflective surface is divided into multiple segments or zones with different structural characteristics. The large-diameter reflective surface is supported by multiple connection members distributed across its area, allowing each segment to better manage local dynamic stresses while maintaining overall structural integrity and reducing total dynamic deformation.
Solution Approach 2:
The scanning micromirror employs composite structural design combining the reflective surface, rim, spring, and connector materials to optimize the balance between mass distribution and structural rigidity. This composite approach allows the large-diameter reflective surface to maintain shape stability during rotation by strategically positioning mass and connection points.
2Manufacturing precision
If the reflective surface diameter is increased for LIDAR applications, then the scanning resolution is improved, but the rotational inertia causes greater dynamic deformation
Solution Approach 1:
The rim structure acts as a counterbalancing element that distributes rotational inertia more evenly across the scanning micromirror. By positioning mass at the outer rim, the design creates a more favorable moment of inertia distribution that reduces dynamic deformation during high-speed rotation, allowing larger diameters to be used without compromising structural integrity.
Solution Approach 2:
The problem of in-plane dynamic deformation is addressed by introducing out-of-plane structural elements, specifically the spring and connector components that provide three-dimensional support. This vertical dimension allows the large-diameter reflective surface to be supported in a way that compensates for rotational stresses, maintaining shape accuracy during operation.
3Device complexity
If a simple mirror structure is used, then the device complexity is reduced, but dynamic deformation increases affecting light reflection accuracy
Solution Approach 1:
The connector acts as an intermediary element between the rim and the reflective surface, providing a specialized connection that reduces dynamic deformation. This intermediate component allows the simple overall structure to achieve improved performance by introducing a targeted structural feature at the critical connection point without substantially increasing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed design significantly reduces dynamic deformation, improving light reflection accuracy and enabling the use of large-diameter reflective surfaces for applications such as LIDAR by minimizing peak-to-peak height differences and RMS values.
Implementation Method 1
a spring positioned on the rotation axis and connected to the reflective surface
Implementation Method 2
a reflective surface rotatable with respect to a rotation axis
Data Source
AI summary
Provided is a scanning micromirror including a reflective surface rotatable with respect to a rotation axis, a rim disposed on the outside of the reflective surface, a spring positioned on the rotation axis and connected to the reflective surface, and a connector connecting the reflective surface and the rim. The rim may include a first sub-rim disposed on one side and a second sub-rim disposed on the other side with respect to the spring.