Monolithic Silicon Micronozzle Array with Integrated Plug Valves
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Solution Overview
Problem
Current Organic Vapor Jet Printing (OVJP) technologies face limitations in printing discrete segments of OLED emissive materials due to their inability to individually attenuate flow from each nozzle, leading to macroscopic systems with limited resolution and cycle times, making them unsuitable for mass production of small area OLED displays.
Innovation Solution
A micronozzle array formed from monolithic silicon with integrated plug valves, where each nozzle includes a microchannel with a taper and a stem with a plug valve suspended by spring elements, allowing for separate attenuation of flow from each nozzle, and actuated by a push rod system, enabling precise control of organic vapor deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional OVJP technology is used, then the system can operate at macroscopic scale, but the resolution and ability to print discrete segments is limited
Solution Approach 1:
The system divides the vapor delivery system into multiple independent micronozzles, each with its own plug valve. This segmentation allows individual control of each nozzle's flow, enabling precise printing of discrete segments while maintaining a manageable overall system structure through modular design.
Solution Approach 2:
The invention introduces dynamically controllable plug valves at each micronozzle that can individually open or close to attenuate flow. This dynamic control capability enables precise temporal and spatial modulation of vapor delivery, achieving high printing resolution without requiring complex macroscopic system reconfiguration.
2Ease of operation
If individual flow control is added to each nozzle, then discrete segments can be printed, but the device complexity increases
Solution Approach 1:
The invention extracts the flow control function into separate, modular plug valves that are integrated with each micronozzle. This extraction allows each nozzle to be independently controlled without affecting other nozzles, simplifying the overall control architecture while enabling precise individual flow attenuation for printing discrete segments.
Solution Approach 2:
The plug valves serve as intermediary elements between the vapor source and the substrate, providing a simple on/off control mechanism for each micronozzle. This intermediary approach enables precise flow control without requiring complex regulation systems, maintaining ease of operation while managing device complexity through standardized valve components.
3Productivity
If macroscopic OVJP systems are used, then the system structure is simpler, but the cycle times are limited
Solution Approach 1:
The invention implements periodic actuation of individual plug valves to control vapor deposition in discrete time intervals. This periodic action allows each micronozzle to be activated only when needed for specific segments, reducing overall cycle time while maintaining the ability to print discrete segments with high precision through synchronized valve control.
Solution Approach 2:
The system applies local quality control by enabling individual plug valves to be opened or closed based on the specific printing requirements of each segment. This localized control allows different regions of the substrate to be processed at different times, optimizing cycle time for each segment while maintaining high manufacturing precision through spatially selective vapor deposition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The micronozzle array with integrated plug valves allows for precise and individual control of organic vapor flow, enhancing the resolution and cycle times of OVJP, enabling the printing of discrete segments and improving the functionality for small area OLED displays, overcoming the limitations of existing OVJP systems.
Implementation Method 1
a stem with a plug valve suspended by spring elements
Implementation Method 2
Organic Vapor Jet Printing (OVJP)
Implementation Method 3
enabling the printing of discrete segments
Data Source
AI summary
Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.