Micropillar Die Attach for Thermal and Mechanical Reliability

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor packaging technologies face challenges in creating a mechanically-stable and thermally-conductive interface between the semiconductor die and the package, particularly for larger dies, due to coefficient of thermal expansion mismatches and voiding issues, which affect both thermal and mechanical performance.

Innovation Solution

The use of patterned surfaces on either the die or the package, or both, with microscopic pillars to increase the effective bonding area and surface area for thermal transport, thereby enhancing mechanical strength and thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional flat die attach surfaces are used, then the manufacturing process is simple, but voiding occurs and thermal conductivity decreases

Engineering Contradiction:
Improvesimplicity of die attach processVSAvoidvoiding and thermal performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent transitions from flat two-dimensional attach surfaces to three-dimensional micropillar structures. The micropillars create vertical surfaces and interstitial spaces that increase the effective bonding area and provide pathways for die attach material flow, eliminating voids while maintaining process simplicity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The micropillar array creates a porous-like structure with controlled void spaces between pillars. These spaces allow die attach material to flow through and bond to multiple surfaces, ensuring complete filling and eliminating air pockets while maintaining thermal conductivity pathways.

Inventive Principle:
Principle #31Porous materials

2Power

If larger die are used, then device power increases, but CTE mismatch and voiding problems worsen

Engineering Contradiction:
Improvedevice power outputVSAvoidCTE management and voiding
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent segments the die attach interface into multiple micropillar units distributed across the die surface. Each micropillar acts as an independent bonding element that can accommodate local thermal expansion differences, distributing stress and preventing large-scale delamination in high-power applications.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The micropillars provide curved surfaces that better conform to thermal expansion movements compared to flat surfaces. The cylindrical geometry allows for more uniform stress distribution during thermal cycling, reducing the impact of CTE mismatch between die and substrate.

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Strength

If die attach material thickness is increased to accommodate voids, then mechanical strength improves, but thermal conductivity decreases

Engineering Contradiction:
Improvemechanical strength of die attachVSAvoidthermal conductivity
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

Instead of increasing thickness in the vertical direction to compensate for voids, the patent increases the effective bonding area through the lateral surfaces of micropillars. This provides mechanical strength through increased surface area for bonding while maintaining thin overall thickness to preserve thermal conductivity pathways.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces voiding, improves thermal conductivity, and increases mechanical reliability by increasing the surface area for bonding and thermal transport, leading to better cooling and stability of semiconductor devices during operation.

Implementation Method 1

Provide high thermal conductivity for conducting heat from the semiconductor die through the package and to the package external surfaces efficiently

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS10410958B2Strain-tolerant die attach with improved thermal conductivity, and method of fabrication
Publication Date: 2019.09.10 NEWRADIANT LLC
  • US10410958B2 patent drawing
  • US10410958B2 patent drawing
  • US10410958B2 patent drawing

AI summary

A mechanically-stable and thermally-conductive interface device between a semiconductor die and a package for the die, and related method of fabrication, comprising: a semiconductor die; a package for the die; a surface area-enhancing pattern on the package and/or the die; and die attach materials between the die and the package, the die attach materials attaching the die to the package through an interface provided by the die attach materials; wherein: an effective bonding area between the die attach materials and the package and/or the die is greater with the pattern than without the pattern; and the increase of the effective bonding area simultaneously increases the surface area for thermal transport between the package and/or the die, and the die attach materials; and increases the surface area for stably attaching the at least one of the package and the die to the die attach materials.