Microplasma UV Lamp Using Excitation Transfer for 194 Nm Output

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Solution Overview

Problem

Conventional gas discharge lamps are inefficient in producing light at shorter wavelengths such as deep-ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions, limiting their applications in semiconductor device fabrication, optical drivers for atomic clocks, and other photochemical processes.

Innovation Solution

A microplasma-based lamp utilizing molecular-atomic or atomic-atomic excitation transfer, where energy is transferred from a donor gas or vapor to an acceptor species through collisions in a high-pressure gas phase, enabling efficient generation of UV and VUV light.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If conventional gas discharge lamps use direct electron impact excitation, then the lamps can produce light efficiently, but the wavelength range is limited to longer wavelengths and cannot efficiently produce deep-UV or VUV light

Engineering Contradiction:

Improvelight production efficiencyVSAvoidwavelength range

Core Design Contradiction:

Illumination intensityVSAdaptability or versatility

Solution Approach 1:

The patent introduces a donor gas (such as mercury vapor) as an intermediary species that absorbs electron impact energy and subsequently transfers it to the acceptor atom (such as hydrogen or deuterium) through atomic-atomic collisions. This two-step process enables efficient population of high-energy states that produce deep-UV and VUV radiation, overcoming the limitation of direct electron impact excitation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If existing VUV lamps (hydrogen, deuterium, rare gas) are used, then the desired wavelength can be achieved, but the radiated power and efficiency are unacceptable

Engineering Contradiction:

Improvewavelength capabilityVSAvoidradiated power

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent changes the operational parameters by operating at elevated pressures (1-10 atmospheres) and using specific gas mixtures with optimized ratios of donor to acceptor gases. These parameter changes enable significantly enhanced radiated power and efficiency compared to conventional low-pressure VUV lamps, while maintaining the ability to produce the desired deep-UV and VUV wavelengths.

Inventive Principle:

Principle #35Parameter changes

3Adaptability or versatility

If the only available Hg ion lamp is a large argon/mercury inductively-coupled lamp, then the required 194 nm light can be produced, but the lamp is inefficient and bulky

Engineering Contradiction:

Improve194 nm light productionVSAvoidlamp size

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent segments the plasma generation into multiple microdischarge regions created by arrays of microelectrodes (with dimensions in the micrometer to millimeter range). This segmentation enables the lamp to operate at atmospheric pressure with significantly reduced size and complexity compared to large inductively-coupled lamps, while efficiently producing the required 194 nm light for mercury ion clocks.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The microplasma-based lamps can produce UV and VUV light efficiently, allowing for miniaturization and improved performance in applications like compact atomic clocks and environmental sensors, with potential for reduced size and cost compared to existing technologies.

Implementation Method 1

Methodology Applied

Scientific EffectMolecular-atomic or atomic-atomic excitation transfer: Penning Effect

Implementation Method 2

The plasma lamp may be configured to excite the energy-donor gas or vapor by the generation of microplasmas within the plurality of microcavities

Methodology Applied

Scientific EffectMicroplasma generation: Plasma

Data Source

PatentUS12424432B2Ultraviolet and vacuum ultraviolet lamps driven by molecular-atomic, atomic-atomic, or atomic-molecular excitation transfer

Publication Date: 2025.09.23 GOOGLE LLC

AI summary

A plasma lamp is provided that employs excitation transfer between two atomic or molecular species so as to preferentially produce light at a specific atomic or molecular emission wavelength. The lamp includes a lamp body. The lamp body includes a top portion, a middle portion having an internal hollow space filled with an energy-donor chemical gas and an energy-acceptor chemical element, and a bottom portion. The lamp body further includes an array of a plurality of cavities connected to the internal hollow space. The internal hollow space and the array of the plurality of cavities are spaced apart from outer surfaces of the lamp body. The plasma lamp is configured to excite the energy-donor chemical gas by an ignition of a low-temperature plasma within the internal hollow space and the array of the plurality of cavities to cause an excitation transfer from the excited energy-donor chemical gas to the energy-acceptor chemical element, thereby emitting radiation having a wavelength of about 194 nm when mercury (Hg) is the energy-acceptor chemical element and helium (He) serves as the donor. Other wavelengths in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions are generated when other donor and acceptor atoms or molecules are employed. These lamps are well-suited as optical drivers for atomic clocks (such as the 40.5 GHz Hg ion clock), photochemical processing of materials, disinfection of water, air, and surfaces, as well as other applications requiring UV or VUV light.