Micropump Diaphragm Actuator Assembly Using Mechanical Bias

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Solution Overview

Problem

Existing methods for producing micropumps with bending converters face limitations due to the need for electrical biasing, which is costly and prone to errors, and are limited by the breakdown voltage of piezo crystals.

Innovation Solution

A method involving mechanical biasing of the diaphragm actuator using fluid pressure, negative pressure, or a combination of both, to align and mount the diaphragm actuator on the pump diaphragm, allowing for a dome-shaped deformation that optimizes the stroke without electrical constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If electrical voltage is applied to mechanically bias the bending converter, then the diaphragm actuator can be biased, but the maximum electric bias is limited to approximately 2 MV/cm by the breakdown voltage of the piezo crystal

Engineering Contradiction:
Improvemechanical bias forceVSAvoidelectrical breakdown risk
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The patent replaces the electrical biasing system with a mechanical biasing system. Instead of applying electrical voltage to the piezo crystal to achieve mechanical bias, the invention uses a mechanical structure (support element with inclined surface) to directly apply mechanical force and displace the piezo crystal into the pump chamber, eliminating the electrical breakdown limitation entirely.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs fluid pressure (pneumatics or hydraulics) to bias the diaphragm actuator. By introducing pressurized fluid into the pump chamber, the diaphragm is mechanically pushed into the chamber, achieving the desired mechanical bias without electrical voltage, thus avoiding the 2 MV/cm breakdown limit.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Ease of manufacture

If electrical voltage supply and contacting are used for biasing, then the diaphragm actuator can be actuated, but the voltage supply and contacting are expensive and error-prone for large fields (arrays) that are needed for cost-effective production

Engineering Contradiction:
Improveproduction costVSAvoidcontacting error rate
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent eliminates the electrical contacting system entirely by replacing it with a mechanical support structure. The support element with its inclined surface provides automatic mechanical positioning and biasing of the piezo crystal array, removing the need for complex electrical contacts and voltage supply infrastructure, thereby reducing both cost and error rates in large-scale production.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The mechanical support structure performs multiple functions automatically: it holds the piezo crystal in position, provides mechanical bias by displacing it into the pump chamber, and ensures proper alignment. This self-service mechanism eliminates the need for external electrical contacting systems, simplifying the manufacturing process for large arrays.

Inventive Principle:
Principle #25Self-service

3Productivity

If the diaphragm actuator is mechanically biased to reach optimum stroke, then the micropump can operate to its full capacity, but the death volume increases if not properly managed

Engineering Contradiction:
Improvemicropump capacityVSAvoiddeath volume
Core Design Contradiction:
ProductivityVSVolume of stationary object

Solution Approach 1:

The patent uses a support element with an inclined surface that guides the piezo crystal into a curved displacement path. This curvature allows the diaphragm actuator to be mechanically biased into the pump chamber in a controlled manner, maximizing the stroke while minimizing the dead volume by ensuring the actuator is properly positioned without excessive displacement.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent optimizes the mechanical bias by carefully controlling the displacement distance and angle of the piezo crystal using the inclined support surface. By adjusting these geometric parameters, the system achieves the optimal balance between diaphragm stroke (for pump capacity) and dead volume minimization, allowing the micropump to operate at full capacity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient and cost-effective production of micropumps by mechanically biasing the diaphragm actuator, overcoming voltage limitations and reducing production costs, while maintaining optimal performance.

Implementation Method 1

deflecting the pump diaphragm in the direction of the diaphragm actuator by means of a fluid pressure that is higher than the ambient pressure

Methodology Applied
Scientific EffectFluid pressure: Pressure Increase

Data Source

PatentUS12404850B2Method for producing a micropump with mechanically biased diaphragm actuator
Publication Date: 2025.09.02 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
  • US12404850B2 patent drawing
  • US12404850B2 patent drawing
  • US12404850B2 patent drawing

AI summary

A method for producing a micropump includes, among others, a step of providing a substrate, wherein the substrate includes at least one pump diaphragm for the micropump. Additionally, a diaphragm actuator for moving the pump diaphragm is provided, wherein the diaphragm actuator is arranged in an holding device. The holding device is aligned relative to the substrate such that the diaphragm actuator is arranged opposite to the pump diaphragm and the pump diaphragm is deflected in the direction of the diaphragm actuator by means of a fluid pressure that is higher than the ambient pressure. Additionally, the diaphragm actuator is mounted on the pump diaphragm.