Microreactor Block Copolymer Intermediates for DSA Precision
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Solution Overview
Problem
Existing methods for synthesizing block copolymers for Directed Self-Assembly (DSA) technology face challenges in precisely controlling molecular weight distribution and dispersion, which are crucial for pattern size and accuracy, due to sensitivity to moisture and oxygen, and limited monomer selectivity.
Innovation Solution
A block copolymer intermediate with a specific structure is synthesized using a microreactor and a coupling reaction, allowing for precise control of molecular weight and dispersion, resulting in a block copolymer with a narrow molecular weight distribution suitable for DSA technology.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If living anionic polymerization using alkyl lithium as initiator is used to obtain block copolymer with low degree of dispersion, then molecular weight distribution can be controlled, but the reaction becomes highly sensitive to moisture and oxygen, making it difficult to precisely control molecular weight distribution
Solution Approach 1:
The patent introduces a diblock copolymer intermediate as a mediator in the polymerization process. This intermediate serves as a controlled starting point that reduces the direct exposure of the sensitive anionic polymerization to moisture and oxygen, thereby maintaining precision while reducing environmental sensitivity.
Solution Approach 2:
The patent performs preliminary synthesis of the diblock copolymer intermediate before the final polymerization step. This preliminary action allows the sensitive polymerization to be conducted under more controlled conditions, with the intermediate already formed and protected, reducing the window of exposure to harmful environmental factors.
2Ease of manufacture
If sequential polymerization method is used to synthesize block copolymer, then the process is simple, but selectivity of first and second monomers is limited
Solution Approach 1:
The patent segments the polymerization process into distinct stages: first forming a diblock copolymer intermediate with specific monomers, then performing a second polymerization with different monomers. This segmentation allows each stage to be optimized for specific monomer pairs, thereby expanding overall monomer selectivity while maintaining process simplicity.
Solution Approach 2:
The patent performs preliminary polymerization to create the diblock copolymer intermediate with predetermined properties. This preliminary action enables the subsequent polymerization to focus on incorporating different monomers with high selectivity, thus expanding the range of applicable monomer combinations while keeping the overall process straightforward.
3Productivity
If conventional block copolymer synthesis is used, then production can be achieved, but molecular weight and dispersion of polymer blocks cannot be precisely controlled, affecting pattern size and accuracy
Solution Approach 1:
The patent uses the diblock copolymer intermediate as a mediator that bridges production efficiency and precision control. The intermediate is synthesized with controlled molecular weight and narrow dispersion, and then serves as the basis for final polymerization, ensuring that the productivity is maintained while the precision of molecular weight and dispersion control is significantly improved.
Solution Approach 2:
The patent performs preliminary synthesis of the diblock copolymer intermediate with precisely controlled molecular weight and dispersion characteristics. This preliminary action ensures that the final polymerization builds upon a well-controlled foundation, thereby achieving both high productivity and precise molecular weight control in the final block copolymer product.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the production of a block copolymer with controlled molecular weight and dispersion, enhancing its applicability to DSA technology by improving synthesis efficiency and reducing sensitivity to environmental factors.
Implementation Method 1
A block copolymer intermediate with a specific structure is synthesized using a microreactor and a coupling reaction
Data Source
AI summary
The block copolymer intermediate represented by the following general formula (1) or (2) is used. In the formulae, R1 and R7 each independently represent a polymerization initiator residue, R2 and R8 each independently represent an aromatic group or an alkyl group, Y1 represents a polymer block of (meth)acrylic ester, Y2 represents a polymer block of styrene or a derivative thereof, and m and n each independently represent in an integer from 1 to 5. In the formulae, R3 represents an alkylene group having 1 to 6 carbon atoms, L represents a linking group, R4 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aromatic group, and R5 and R6 each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.