Microreactor CVD for Uniform Hollow Shells

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Solution Overview

Problem

Traditional chemical vapor deposition (CVD) processes are batch-based, leading to non-uniformity in product characteristics, such as carbon nanotube length distribution, and are inefficient for mass-producing hollow spherical shells, which are difficult to fabricate using existing methods.

Innovation Solution

A microreactor system for CVD that involves flowing a carrier liquid through a reactor, where reactants are introduced to form microreactors suspended in the liquid, allowing for controlled temperature and pressure conditions to achieve uniform chemical vapor deposition products, including hollow spherical shells and carbon nanotubes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional batch-based CVD processes are used, then the process is simple to operate, but the product uniformity deteriorates due to spatial variation in growth conditions

Engineering Contradiction:
Improveproduct uniformityVSAvoidreactor system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The continuous reactor is segmented into multiple zones (preheat zone, reaction zone, cooling zone) along the flow direction, allowing different temperature and pressure conditions in each zone to achieve uniform product growth while maintaining continuous operation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system uses dynamic control of temperature and pressure gradients along the reactor length, with heating elements and cooling sections positioned to create optimal growth conditions at different locations, enabling uniform product characteristics throughout the batch

Inventive Principle:
Principle #15Dynamics

2Productivity

If batch processing methods are used for hollow spherical shells, then the fabrication process is established, but the productivity deteriorates due to difficulty in mass production

Engineering Contradiction:
Improvemass production efficiencyVSAvoidfabrication difficulty
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The reactor enables continuous processing where carrier liquid flows continuously through the system, allowing uninterrupted production of hollow spherical shells. Multiple shells can be grown simultaneously in different zones, and the process can run continuously without batch cycling, significantly increasing productivity

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system uses fluid dynamics principles where carrier liquid flows through the reactor carrying precursor materials, and gas-phase reactants are introduced to form hollow spherical shells. The fluid flow patterns enable controlled deposition and facilitate continuous operation

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Loss of time

If batch CVD reactors are used, then the equipment is simple, but the production time deteriorates due to batch processing limitations

Engineering Contradiction:
Improveproduction timeVSAvoidreactor configuration
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The continuous flow reactor eliminates batch cycling by maintaining continuous reaction conditions. Carrier liquid and gas reactants flow continuously through the reactor, allowing products to be formed and collected without stopping, dramatically reducing total production time for large quantities

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The reactor extends the process in the spatial dimension along the flow direction, with different growth stages occurring at different positions along the reactor length. This transforms the batch process timeline into a spatial progression, allowing simultaneous multi-stage processing

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Manufacturing precision

If traditional CVD methods are used for hollow spherical shells, then the process is established, but the product uniformity deteriorates due to shell growth outside substrate

Engineering Contradiction:
Improveshell uniformityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

A carrier liquid serves as an intermediary medium that transports precursor materials and facilitates controlled shell growth. The liquid phase provides a uniform distribution environment for reactants, enabling consistent shell formation around spherical substrates and improving uniformity

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of uniformly sized and shaped products, such as carbon nanotubes and hollow spherical shells, with improved uniformity and efficiency, overcoming the limitations of traditional batch processing methods.

Implementation Method 1

The fluid is at a first temperature and first pressure and is sufficiently immiscible in the carrier liquid so as to form a plurality of microreactors suspended in the carrier liquid

Methodology Applied
Scientific EffectImmiscibility: Emulsion

Implementation Method 2

a chemical vapor deposition reaction occurs within the microreactors to form a plurality of chemical vapor deposition products

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS11371135B2System and process for chemical vapor deposition
Publication Date: 2022.06.28 THE BOEING CO
  • US11371135B2 patent drawing
  • US11371135B2 patent drawing
  • US11371135B2 patent drawing

AI summary

A chemical vapor deposition method comprises flowing a carrier liquid through a reactor. A fluid comprising one or more reactants is introduced into the carrier liquid. The fluid is at a first temperature and first pressure and is sufficiently immiscible in the carrier liquid so as to form a plurality of microreactors suspended in the carrier liquid. Each of the microreactors comprise a discrete volume of the fluid and have a surface boundary defined by an interface of the fluid with the carrier liquid. The fluid is heated and optionally pressurized to a second temperature and second pressure at which a chemical vapor deposition reaction occurs within the microreactors to form a plurality of chemical vapor deposition products. The plurality of chemical vapor deposition products are separated from the carrier liquid. A system for carrying out the method of the present disclosure is also taught.