Microscale Vacuum Device Mechanical Cathode Modulation

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Solution Overview

Problem

Microscale vacuum electronic devices face challenges in tuning and electrical interactions due to their small size, including the need for changing cavity sizes and close element spacing, which complicates the generation and control of high-frequency signals.

Innovation Solution

A microscale vacuum electrical device employing mechanical modulation, using a piezoelectric actuator to modulate the cathode's position relative to a grid or anode, eliminating the need for tuned coupling cavities and reducing electrical interactions, with nanoscale pillars for improved electron emissivity and high-frequency modulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If microscale vacuum electronic devices use conventional electrical modulation with grids or tuned coupling cavities, then high-frequency signals can be generated, but device tuning becomes complex and electrical interactions between closely spaced elements increase

Engineering Contradiction:
Improvedevice tuningVSAvoidtuning complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces electrical modulation mechanisms (grids, tuned coupling cavities) with a mechanical modulation system. A piezoelectric actuator mechanically modulates the cathode position relative to the anode, substituting complex electrical tuning structures with a simple mechanical displacement system that is easier to control and tune.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention extracts and removes the complex tuned coupling cavities and grid structures from the microscale device. By eliminating these components and using direct mechanical modulation of the cathode-anode spacing, the device achieves high-frequency operation without the tuning complexity associated with conventional electrical modulation structures.

Inventive Principle:
Principle #2Taking out (Extraction)

2Volume of moving object

If microscale vacuum electronic devices use close element spacing to achieve small size, then miniaturization is achieved, but undesired electrical interactions between elements increase

Engineering Contradiction:
Improvedevice sizeVSAvoidelectrical interactions
Core Design Contradiction:
Volume of moving objectVSObject-generated harmful factors

Solution Approach 1:

The patent replaces electrical field-based modulation (which causes unwanted electrical interactions between closely spaced elements) with mechanical modulation. By physically moving the cathode using a piezoelectric actuator, the system achieves modulation without the parasitic electrical coupling that plagues closely spaced electrical structures.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The piezoelectric actuator serves as an intermediary mechanism that converts electrical control signals into mechanical displacement. This intermediate mechanical step isolates the control electronics from the high-voltage electron beam path, reducing unwanted electrical interactions between the modulation signals and the electron beam.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Speed

If microscale vacuum electronic devices use conventional electrical modulation, then high-frequency signals can be generated, but the device requires complex tuned coupling cavities and grid voltage modulation

Engineering Contradiction:
Improvesignal frequencyVSAvoidmodulation structure
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent substitutes electrical modulation structures with mechanical modulation. The piezoelectric actuator directly mechanically modulates the cathode position at high frequencies (capable of operating up to 10 GHz), eliminating the need for complex tuned coupling cavities and grid voltage modulation circuits while achieving the required signal frequencies.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention introduces dynamic mechanical motion of the cathode through the piezoelectric actuator. This dynamic mechanical modulation replaces static electrical field modulation, allowing high-frequency operation through controlled mechanical oscillation rather than complex electrical resonance structures.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies device tuning, reduces undesired electrical interactions, and enables the generation of high-frequency signals with improved electron beam modulation, facilitating microscale fabrication and operation up to 10 GHz frequencies.

Implementation Method 1

An actuator receives a first signal to modulate a relative location of a cathode, for example with respect to a grid or the anode, at a frequency greater than 50 kilohertz and for nanoscale devices to frequencies of up to 10 GHz, to modulate the electron beam. The actuator may be a piezoelectric device.

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a cathode producing an electron beam directed toward an anode

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Data Source

PatentUS7736210B2Microscale high-frequency vacuum electrical device
Publication Date: 2010.06.15 WISCONSIN ALUMNI RES FOUND
  • US7736210B2 patent drawing
  • US7736210B2 patent drawing
  • US7736210B2 patent drawing

AI summary

A microscale vacuum electronic device (10) provides for a mechanical modulation of cathode (12) position with respect to the anode position, the anode electrically biased with respect to the cathode and held in an evacuated housing with the cathode, allowing improved high-frequency modulation of an electron beam (24) useful for vacuum electronic devices such as klystrons, klystrodes, and high frequency triodes.